Design, fabrication and testing of a novel MEMS resonator for mass sensing applications

Micro- and nanoelectromechanical systems (MEMS/NEMS) have a high potential for mass sensing application. By miniaturization of the dimensions, higher and higher sensitivities can be achieved. Here we are presenting finite element modelling and optimization of a free–free beam type mechanical resonator. The hope is to optimize the mass sensitivity by increasing the Q-factor, which in turn, decreases the frequency noise in the system. Furthermore, a novel process sequence will be presented in order to fabricate micro and nanomechanical resonators with integrated electrostatic actuation and piezoresistive readout. Finally, some preliminary characterization results have been performed, demonstrating Q-factors up to 38,000 in high vacuum and 13,000 at moderate vacuum, on an array of cantilever devices, giving us some insight on how to optimize the mechanical design for gas based measurements. 2007 Elsevier B.V. All rights reserved.