Design, Fabrication and Characterization of a Submicroelectromechanical Resnonator with Monolithically Integrated CMOS Readout Circuit

J. Verd, G. Abadal, J. Teva, M. Villaroya Gaudó, A. Uranga, X. Borrisé, F. Campabadal, J. Esteve, E. Figueras Costa, F. Perez-Murano, Zachary James Davis, Esko Sebastian Forsén, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalI E E E Journal of Microelectromechanical Systems
    Issue number3
    Pages (from-to)508-519
    Publication statusPublished - 2005

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