Design, Fabrication and Characterization of a Submicroelectromechanical Resnonator with Monolithically Integrated CMOS Readout Circuit

J. Verd; G. Abadal; J. Teva; M. Villaroya Gaudó; A. Uranga; X. Borrisé; F. Campabadal; J. Esteve; E. Figueras Costa; F. Perez-Murano; Zachary James Davis; Esko Sebastian Forsén; Anja Boisen

Design, Fabrication and Characterization of a Submicroelectromechanical Resnonator with Monolithically Integrated CMOS Readout Circuit

J. Verd, G. Abadal, J. Teva, M. Villaroya Gaudó, A. Uranga, X. Borrisé, F. Campabadal, J. Esteve, E. Figueras Costa, F. Perez-Murano, Zachary James Davis, Esko Sebastian Forsén, Anja Boisen

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	I E E E Journal of Microelectromechanical Systems
Volume	14
Issue number	3
Pages (from-to)	508-519
ISSN	1057-7157
Publication status	Published - 2005

OpenUrl availability

Full text

Cite this

Verd, J., Abadal, G., Teva, J., Villaroya Gaudó, M., Uranga, A., Borrisé, X., Campabadal, F., Esteve, J., Figueras Costa, E., Perez-Murano, F., Davis, Z. J., Forsén, E. S., & Boisen, A. (2005). Design, Fabrication and Characterization of a Submicroelectromechanical Resnonator with Monolithically Integrated CMOS Readout Circuit. I E E E Journal of Microelectromechanical Systems, 14(3), 508-519.

@article{da38a50855864f85aa4569ec31bb65bf,

title = "Design, Fabrication and Characterization of a Submicroelectromechanical Resnonator with Monolithically Integrated CMOS Readout Circuit",

author = "J. Verd and G. Abadal and J. Teva and {Villaroya Gaud{\'o}}, M. and A. Uranga and X. Borris{\'e} and F. Campabadal and J. Esteve and {Figueras Costa}, E. and F. Perez-Murano and Davis, {Zachary James} and Fors{\'e}n, {Esko Sebastian} and Anja Boisen",

year = "2005",

language = "English",

volume = "14",

pages = "508--519",

journal = "I E E E Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "Institute of Electrical and Electronics Engineers",

number = "3",

}

Verd, J, Abadal, G, Teva, J, Villaroya Gaudó, M, Uranga, A, Borrisé, X, Campabadal, F, Esteve, J, Figueras Costa, E, Perez-Murano, F, Davis, ZJ, Forsén, ES & Boisen, A 2005, 'Design, Fabrication and Characterization of a Submicroelectromechanical Resnonator with Monolithically Integrated CMOS Readout Circuit', I E E E Journal of Microelectromechanical Systems, vol. 14, no. 3, pp. 508-519.

TY - JOUR

T1 - Design, Fabrication and Characterization of a Submicroelectromechanical Resnonator with Monolithically Integrated CMOS Readout Circuit

AU - Verd, J.

AU - Abadal, G.

AU - Teva, J.

AU - Villaroya Gaudó, M.

AU - Uranga, A.

AU - Borrisé, X.

AU - Campabadal, F.

AU - Esteve, J.

AU - Figueras Costa, E.

AU - Perez-Murano, F.

AU - Davis, Zachary James

AU - Forsén, Esko Sebastian

AU - Boisen, Anja

PY - 2005

Y1 - 2005

M3 - Journal article

SN - 1057-7157

VL - 14

SP - 508

EP - 519

JO - I E E E Journal of Microelectromechanical Systems

JF - I E E E Journal of Microelectromechanical Systems

IS - 3

ER -