Design, Fabrication and Characterization of a Submicroelectromechanical Resnonator with Monolithically Integrated CMOS Readout Circuit

J. Verd, G. Abadal, J. Teva, M. Villaroya Gaudó, A. Uranga, X. Borrisé, F. Campabadal, J. Esteve, E. Figueras Costa, F. Perez-Murano, Zachary James Davis, Esko Sebastian Forsén, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalI E E E Journal of Microelectromechanical Systems
    Volume14
    Issue number3
    Pages (from-to)508-519
    ISSN1057-7157
    Publication statusPublished - 2005

    Cite this

    Verd, J. ; Abadal, G. ; Teva, J. ; Villaroya Gaudó, M. ; Uranga, A. ; Borrisé, X. ; Campabadal, F. ; Esteve, J. ; Figueras Costa, E. ; Perez-Murano, F. ; Davis, Zachary James ; Forsén, Esko Sebastian ; Boisen, Anja. / Design, Fabrication and Characterization of a Submicroelectromechanical Resnonator with Monolithically Integrated CMOS Readout Circuit. In: I E E E Journal of Microelectromechanical Systems. 2005 ; Vol. 14, No. 3. pp. 508-519.
    @article{da38a50855864f85aa4569ec31bb65bf,
    title = "Design, Fabrication and Characterization of a Submicroelectromechanical Resnonator with Monolithically Integrated CMOS Readout Circuit",
    author = "J. Verd and G. Abadal and J. Teva and {Villaroya Gaud{\'o}}, M. and A. Uranga and X. Borris{\'e} and F. Campabadal and J. Esteve and {Figueras Costa}, E. and F. Perez-Murano and Davis, {Zachary James} and Fors{\'e}n, {Esko Sebastian} and Anja Boisen",
    year = "2005",
    language = "English",
    volume = "14",
    pages = "508--519",
    journal = "I E E E Journal of Microelectromechanical Systems",
    issn = "1057-7157",
    publisher = "Institute of Electrical and Electronics Engineers",
    number = "3",

    }

    Verd, J, Abadal, G, Teva, J, Villaroya Gaudó, M, Uranga, A, Borrisé, X, Campabadal, F, Esteve, J, Figueras Costa, E, Perez-Murano, F, Davis, ZJ, Forsén, ES & Boisen, A 2005, 'Design, Fabrication and Characterization of a Submicroelectromechanical Resnonator with Monolithically Integrated CMOS Readout Circuit', I E E E Journal of Microelectromechanical Systems, vol. 14, no. 3, pp. 508-519.

    Design, Fabrication and Characterization of a Submicroelectromechanical Resnonator with Monolithically Integrated CMOS Readout Circuit. / Verd, J.; Abadal, G.; Teva, J.; Villaroya Gaudó, M.; Uranga, A.; Borrisé, X.; Campabadal, F.; Esteve, J.; Figueras Costa, E.; Perez-Murano, F.; Davis, Zachary James; Forsén, Esko Sebastian; Boisen, Anja.

    In: I E E E Journal of Microelectromechanical Systems, Vol. 14, No. 3, 2005, p. 508-519.

    Research output: Contribution to journalJournal articleResearchpeer-review

    TY - JOUR

    T1 - Design, Fabrication and Characterization of a Submicroelectromechanical Resnonator with Monolithically Integrated CMOS Readout Circuit

    AU - Verd, J.

    AU - Abadal, G.

    AU - Teva, J.

    AU - Villaroya Gaudó, M.

    AU - Uranga, A.

    AU - Borrisé, X.

    AU - Campabadal, F.

    AU - Esteve, J.

    AU - Figueras Costa, E.

    AU - Perez-Murano, F.

    AU - Davis, Zachary James

    AU - Forsén, Esko Sebastian

    AU - Boisen, Anja

    PY - 2005

    Y1 - 2005

    M3 - Journal article

    VL - 14

    SP - 508

    EP - 519

    JO - I E E E Journal of Microelectromechanical Systems

    JF - I E E E Journal of Microelectromechanical Systems

    SN - 1057-7157

    IS - 3

    ER -