The design and fabrication challenges in the first ever attempt to realize a 1-THz vacuum tube amplifier are described. Implementation of innovative solutions including a slow-wave structure in the form of a double corrugated waveguide, lateral tapered input and output couplers, deep X-ray LIGA fabrication process, and a cascade architecture of the backward wave amplifier are discussed. New knowledge in the field of terahertz vacuum devices brought by intensive simulations and development of advanced fabrication and assembly processes of the micro-structures is highlighted.
- Cascade backward wave amplifier
- Double corrugated waveguide
- Optically driven terahertz amplifier (OPTHER)