Design and modeling of an all-optical frequency modulated MEMS strain sensor using nanoscale Bragg gratings

Kasper Reck; Ninia Sejersen Almind; Mikkel Dysseholm Mar; Jörg Hübner; Ole Hansen; Erik Vilain Thomsen

doi:10.1109/ICSENS.2009.5398237

Design and modeling of an all-optical frequency modulated MEMS strain sensor using nanoscale Bragg gratings

Kasper Reck
, Ninia Sejersen Almind
, Mikkel Dysseholm Mar
, Jörg Hübner
, Ole Hansen
, Erik Vilain Thomsen

Research output: Contribution to journal › Conference article › Research › peer-review

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Abstract

We present modeling and design of an all-optical MEMS Bragg grating (half-pitch of 125 nm) strain sensor for single-fiber distributed sensing. Low optical loss and the use of frequency modulation rather than amplitude modulation, makes this sensor better suited for distributed systems than comparable designs, e.g. Fabry-Perot and Mach-Zender. Also, multiplexing of several sensors with different period gratings, allow sensors to be connected to a single fiber, thereby minimizing cabling and simplifying readout. We show through analytical analysis and finite element modeling (FEM) that large mechanical amplification can be obtained if using an angled double beam micrometer scale MEMS structure, compared to conventional fiber Bragg grating sensors. An optimized design and fabrication process is presented.

Original language	English
Journal	I E E E Sensors. Proceedings
Pages (from-to)	873-877
ISSN	1930-0395
DOIs	https://doi.org/10.1109/ICSENS.2009.5398237
Publication status	Published - 2009
Event	8th IEEE Conference on Sensors - Christchurch, New Zealand Duration: 25 Oct 2009 → 28 Oct 2009

Conference

Conference	8th IEEE Conference on Sensors
Country/Territory	New Zealand
City	Christchurch
Period	25/10/2009 → 28/10/2009

Bibliographical note

Copyright 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

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@inproceedings{365a5786f30a4929ac9dcc581bb82761,

title = "Design and modeling of an all-optical frequency modulated MEMS strain sensor using nanoscale Bragg gratings",

abstract = "We present modeling and design of an all-optical MEMS Bragg grating (half-pitch of 125 nm) strain sensor for single-fiber distributed sensing. Low optical loss and the use of frequency modulation rather than amplitude modulation, makes this sensor better suited for distributed systems than comparable designs, e.g. Fabry-Perot and Mach-Zender. Also, multiplexing of several sensors with different period gratings, allow sensors to be connected to a single fiber, thereby minimizing cabling and simplifying readout. We show through analytical analysis and finite element modeling (FEM) that large mechanical amplification can be obtained if using an angled double beam micrometer scale MEMS structure, compared to conventional fiber Bragg grating sensors. An optimized design and fabrication process is presented.",

author = "Kasper Reck and Almind, \{Ninia Sejersen\} and Mar, \{Mikkel Dysseholm\} and J{\"o}rg H{\"u}bner and Ole Hansen and Thomsen, \{Erik Vilain\}",

note = "Copyright 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.; 8th IEEE Conference on Sensors, IEEE Sensors 2009 ; Conference date: 25-10-2009 Through 28-10-2009",

year = "2009",

doi = "10.1109/ICSENS.2009.5398237",

language = "English",

pages = "873--877",

journal = "I E E E Sensors. Proceedings",

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T1 - Design and modeling of an all-optical frequency modulated MEMS strain sensor using nanoscale Bragg gratings

AU - Reck, Kasper

AU - Almind, Ninia Sejersen

AU - Mar, Mikkel Dysseholm

AU - Hübner, Jörg

AU - Hansen, Ole

AU - Thomsen, Erik Vilain

N1 - Copyright 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

PY - 2009

Y1 - 2009

N2 - We present modeling and design of an all-optical MEMS Bragg grating (half-pitch of 125 nm) strain sensor for single-fiber distributed sensing. Low optical loss and the use of frequency modulation rather than amplitude modulation, makes this sensor better suited for distributed systems than comparable designs, e.g. Fabry-Perot and Mach-Zender. Also, multiplexing of several sensors with different period gratings, allow sensors to be connected to a single fiber, thereby minimizing cabling and simplifying readout. We show through analytical analysis and finite element modeling (FEM) that large mechanical amplification can be obtained if using an angled double beam micrometer scale MEMS structure, compared to conventional fiber Bragg grating sensors. An optimized design and fabrication process is presented.

AB - We present modeling and design of an all-optical MEMS Bragg grating (half-pitch of 125 nm) strain sensor for single-fiber distributed sensing. Low optical loss and the use of frequency modulation rather than amplitude modulation, makes this sensor better suited for distributed systems than comparable designs, e.g. Fabry-Perot and Mach-Zender. Also, multiplexing of several sensors with different period gratings, allow sensors to be connected to a single fiber, thereby minimizing cabling and simplifying readout. We show through analytical analysis and finite element modeling (FEM) that large mechanical amplification can be obtained if using an angled double beam micrometer scale MEMS structure, compared to conventional fiber Bragg grating sensors. An optimized design and fabrication process is presented.

U2 - 10.1109/ICSENS.2009.5398237

DO - 10.1109/ICSENS.2009.5398237

M3 - Conference article

SN - 1930-0395

SP - 873

EP - 877

JO - I E E E Sensors. Proceedings

JF - I E E E Sensors. Proceedings

T2 - 8th IEEE Conference on Sensors

Y2 - 25 October 2009 through 28 October 2009

ER -

Design and modeling of an all-optical frequency modulated MEMS strain sensor using nanoscale Bragg gratings

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