Design and modeling of an all-optical frequency modulated MEMS strain sensor using nanoscale Bragg gratings

Kasper Reck, Ninia Sejersen Almind, Mikkel Dysseholm Mar, Jörg Hübner, Ole Hansen, Erik Vilain Thomsen

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We present modeling and design of an all-optical MEMS Bragg grating (half-pitch of 125 nm) strain sensor for single-fiber distributed sensing. Low optical loss and the use of frequency modulation rather than amplitude modulation, makes this sensor better suited for distributed systems than comparable designs, e.g. Fabry-Perot and Mach-Zender. Also, multiplexing of several sensors with different period gratings, allow sensors to be connected to a single fiber, thereby minimizing cabling and simplifying readout. We show through analytical analysis and finite element modeling (FEM) that large mechanical amplification can be obtained if using an angled double beam micrometer scale MEMS structure, compared to conventional fiber Bragg grating sensors. An optimized design and fabrication process is presented.
Original languageEnglish
JournalI E E E Sensors. Proceedings
Pages (from-to)873-877
Publication statusPublished - 2009
Event8th IEEE Conference on Sensors - Christchurch, New Zealand
Duration: 25 Oct 200928 Oct 2009


Conference8th IEEE Conference on Sensors
Country/TerritoryNew Zealand

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