TY - GEN
T1 - Design and modeling of an all-optical frequency modulated MEMS strain sensor using nanoscale Bragg gratings
AU - Reck, Kasper
AU - Almind, Ninia Sejersen
AU - Mar, Mikkel Dysseholm
AU - Hübner, Jörg
AU - Hansen, Ole
AU - Thomsen, Erik Vilain
N1 - Copyright 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
PY - 2009
Y1 - 2009
N2 - We present modeling and design of an all-optical MEMS Bragg grating (half-pitch of 125 nm) strain sensor for single-fiber distributed sensing. Low optical loss and the use of frequency modulation rather than amplitude modulation, makes this sensor better suited for distributed systems than comparable designs, e.g. Fabry-Perot and Mach-Zender. Also, multiplexing of several sensors with different period gratings, allow sensors to be connected to a single fiber, thereby minimizing cabling and simplifying readout. We show through analytical analysis and finite element modeling (FEM) that large mechanical amplification can be obtained if using an angled double beam micrometer scale MEMS structure, compared to conventional fiber Bragg grating sensors. An optimized design and fabrication process is presented.
AB - We present modeling and design of an all-optical MEMS Bragg grating (half-pitch of 125 nm) strain sensor for single-fiber distributed sensing. Low optical loss and the use of frequency modulation rather than amplitude modulation, makes this sensor better suited for distributed systems than comparable designs, e.g. Fabry-Perot and Mach-Zender. Also, multiplexing of several sensors with different period gratings, allow sensors to be connected to a single fiber, thereby minimizing cabling and simplifying readout. We show through analytical analysis and finite element modeling (FEM) that large mechanical amplification can be obtained if using an angled double beam micrometer scale MEMS structure, compared to conventional fiber Bragg grating sensors. An optimized design and fabrication process is presented.
U2 - 10.1109/ICSENS.2009.5398237
DO - 10.1109/ICSENS.2009.5398237
M3 - Conference article
SN - 1930-0395
SP - 873
EP - 877
JO - I E E E Sensors. Proceedings
JF - I E E E Sensors. Proceedings
T2 - 8th IEEE Conference on Sensors
Y2 - 25 October 2009 through 28 October 2009
ER -