Design and fabrication of in-plane AFM probes with sharp silicon nitride tips based on refilling of anisotropically etched silicon moulds

J. Geerlings, E. Sarajlic, J. W. Berenschot, M. H. Siekman, H. V. Jansen, L. Abelmann, N. R. Tas

Research output: Contribution to journal › Journal article › Research › peer-review

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