Design and fabrication of compliant micromechanisms and structures with negative Poisson's ratio

Ulrik Darling Larsen, Ole Sigmund, Siebe Bouwstra

    Research output: Contribution to journalJournal articleResearchpeer-review

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    Abstract

    This paper describes a new way to design and fabricate compliant micromechanisms and material structures with negative Poisson's ratio (NPR). The design of compliant mechanisms and material structures is accomplished in an automated way using a numerical topology optimization method, The procedure allows the user to specify the elastic properties of materials or the mechanical advantages (MA's) or geometrical advantages (GA's) of compliant mechanisms and returns the optimal structures. The topologies obtained by the numerical procedure require practically no interaction by the engineer before they can be transferred to the fabrication unit. Fabrication is carried out by patterning a sputtered silicon on a plasma-enhanced chemical vapor deposition (PECVD) glass with a laser micromachining setup. Subsequently, the structures are etched into the underlying PECVD glass, and the glass is underetched, all in one two-step reactive ion etching (RIE) process. The components are tested using a probe placed on an x-y stage. This fast prototyping allows newly developed topologies to be fabricated and tested within the same day
    Original languageEnglish
    JournalI E E E Journal of Microelectromechanical Systems
    Volume6
    Pages (from-to)99-106
    ISSN1057-7157
    DOIs
    Publication statusPublished - 1997

    Bibliographical note

    Copyright: 1997 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

    Cite this

    @article{b2449d9cbc4b4c0aa8bd1d01bac92fbd,
    title = "Design and fabrication of compliant micromechanisms and structures with negative Poisson's ratio",
    abstract = "This paper describes a new way to design and fabricate compliant micromechanisms and material structures with negative Poisson's ratio (NPR). The design of compliant mechanisms and material structures is accomplished in an automated way using a numerical topology optimization method, The procedure allows the user to specify the elastic properties of materials or the mechanical advantages (MA's) or geometrical advantages (GA's) of compliant mechanisms and returns the optimal structures. The topologies obtained by the numerical procedure require practically no interaction by the engineer before they can be transferred to the fabrication unit. Fabrication is carried out by patterning a sputtered silicon on a plasma-enhanced chemical vapor deposition (PECVD) glass with a laser micromachining setup. Subsequently, the structures are etched into the underlying PECVD glass, and the glass is underetched, all in one two-step reactive ion etching (RIE) process. The components are tested using a probe placed on an x-y stage. This fast prototyping allows newly developed topologies to be fabricated and tested within the same day",
    author = "Larsen, {Ulrik Darling} and Ole Sigmund and Siebe Bouwstra",
    note = "Copyright: 1997 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE",
    year = "1997",
    doi = "10.1109/84.585787",
    language = "English",
    volume = "6",
    pages = "99--106",
    journal = "I E E E Journal of Microelectromechanical Systems",
    issn = "1057-7157",
    publisher = "Institute of Electrical and Electronics Engineers",

    }

    Design and fabrication of compliant micromechanisms and structures with negative Poisson's ratio. / Larsen, Ulrik Darling; Sigmund, Ole; Bouwstra, Siebe.

    In: I E E E Journal of Microelectromechanical Systems, Vol. 6, 1997, p. 99-106.

    Research output: Contribution to journalJournal articleResearchpeer-review

    TY - JOUR

    T1 - Design and fabrication of compliant micromechanisms and structures with negative Poisson's ratio

    AU - Larsen, Ulrik Darling

    AU - Sigmund, Ole

    AU - Bouwstra, Siebe

    N1 - Copyright: 1997 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

    PY - 1997

    Y1 - 1997

    N2 - This paper describes a new way to design and fabricate compliant micromechanisms and material structures with negative Poisson's ratio (NPR). The design of compliant mechanisms and material structures is accomplished in an automated way using a numerical topology optimization method, The procedure allows the user to specify the elastic properties of materials or the mechanical advantages (MA's) or geometrical advantages (GA's) of compliant mechanisms and returns the optimal structures. The topologies obtained by the numerical procedure require practically no interaction by the engineer before they can be transferred to the fabrication unit. Fabrication is carried out by patterning a sputtered silicon on a plasma-enhanced chemical vapor deposition (PECVD) glass with a laser micromachining setup. Subsequently, the structures are etched into the underlying PECVD glass, and the glass is underetched, all in one two-step reactive ion etching (RIE) process. The components are tested using a probe placed on an x-y stage. This fast prototyping allows newly developed topologies to be fabricated and tested within the same day

    AB - This paper describes a new way to design and fabricate compliant micromechanisms and material structures with negative Poisson's ratio (NPR). The design of compliant mechanisms and material structures is accomplished in an automated way using a numerical topology optimization method, The procedure allows the user to specify the elastic properties of materials or the mechanical advantages (MA's) or geometrical advantages (GA's) of compliant mechanisms and returns the optimal structures. The topologies obtained by the numerical procedure require practically no interaction by the engineer before they can be transferred to the fabrication unit. Fabrication is carried out by patterning a sputtered silicon on a plasma-enhanced chemical vapor deposition (PECVD) glass with a laser micromachining setup. Subsequently, the structures are etched into the underlying PECVD glass, and the glass is underetched, all in one two-step reactive ion etching (RIE) process. The components are tested using a probe placed on an x-y stage. This fast prototyping allows newly developed topologies to be fabricated and tested within the same day

    U2 - 10.1109/84.585787

    DO - 10.1109/84.585787

    M3 - Journal article

    VL - 6

    SP - 99

    EP - 106

    JO - I E E E Journal of Microelectromechanical Systems

    JF - I E E E Journal of Microelectromechanical Systems

    SN - 1057-7157

    ER -