Design and fabrication of compliant micromechanisms and structures with negative Poisson's ratio

Ulrik Darling Larsen, Ole Sigmund, Siebe Bouwstra

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    This paper describes a new way to design and fabricate compliant micromechanisms and material structures with negative Poisson's ratio (NPR). The design of compliant mechanisms and material structures is accomplished in an automated way using a numerical topology optimization method, The procedure allows the user to specify the elastic properties of materials or the mechanical advantages (MA's) or geometrical advantages (GA's) of compliant mechanisms and returns the optimal structures. The topologies obtained by the numerical procedure require practically no interaction by the engineer before they can be transferred to the fabrication unit. Fabrication is carried out by patterning a sputtered silicon on a plasma-enhanced chemical vapor deposition (PECVD) glass with a laser micromachining setup. Subsequently, the structures are etched into the underlying PECVD glass, and the glass is underetched, all in one two-step reactive ion etching (RIE) process. The components are tested using a probe placed on an x-y stage. This fast prototyping allows newly developed topologies to be fabricated and tested within the same day
    Original languageEnglish
    JournalI E E E Journal of Microelectromechanical Systems
    Pages (from-to)99-106
    Publication statusPublished - 1997

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