Design and fabrication of compliant micromechanisms and structures with negative Poisson's ratio

Ulrik Darling Larsen, Ole Sigmund, Siebe Bouwstra

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Abstract

This paper describes a new way to design and fabricate compliant micromechanisms and material structures with negative Poisson's ratio (NPR). The design of compliant mechanisms and material structures is accomplished in an automated way using a numerical topology optimization method. The procedure allows the user to specify the elastic properties of materials or the mechanical or geometrical advantages of compliant mechanisms and returns the optimal structures. The topologies obtained by the numerical procedure require practically no interaction by the engineer before they can be transferred to the fabrication unit. Fabrication is carried out by patterning a sputtered silicon on a PECVD-glass with a laser micromachining set-up. Subsequently the structures are etched into the underlying PECVD-glass and the glass are underetched, all in one two-step RIE process. The components are tested using a probe placed on an xy-stage. This fast prototyping allows newly developed topologies to be fabricated and tested within the same day
Original languageEnglish
Title of host publicationProceedings of the Ninth Annual International Workshop on Micro Electro Mechanical Systems
PublisherIEEE
Publication date1996
Pages365-371
ISBN (Print)0-7803-2985-6
DOIs
Publication statusPublished - 1996
EventAnnual International Workshop on Micro Electro Mechanical Systems : An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems -
Duration: 1 Jan 1996 → …
Conference number: 9nd

Conference

ConferenceAnnual International Workshop on Micro Electro Mechanical Systems : An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems
Number9nd
Period01/01/1996 → …

Bibliographical note

Copyright: 1996 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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