Design and Fabrication of Air-core Inductors for Power Conversion

Research output: Contribution to conferencePoster – Annual report year: 2016Researchpeer-review

Standard

Design and Fabrication of Air-core Inductors for Power Conversion. / Lê Thanh, Hoà; Mizushima, Io; Tang, Peter Torben; Ouyang, Ziwei; Knott, Arnold; Jensen, Flemming; Han, Anpan.

2016. Poster session presented at 5th International Workshop on Power Supply On Chip, Madrid, Spain.

Research output: Contribution to conferencePoster – Annual report year: 2016Researchpeer-review

Harvard

Lê Thanh, H, Mizushima, I, Tang, PT, Ouyang, Z, Knott, A, Jensen, F & Han, A 2016, 'Design and Fabrication of Air-core Inductors for Power Conversion' 5th International Workshop on Power Supply On Chip, Madrid, Spain, 03/10/2016 - 05/10/2016, .

APA

Lê Thanh, H., Mizushima, I., Tang, P. T., Ouyang, Z., Knott, A., Jensen, F., & Han, A. (2016). Design and Fabrication of Air-core Inductors for Power Conversion. Poster session presented at 5th International Workshop on Power Supply On Chip, Madrid, Spain.

CBE

Lê Thanh H, Mizushima I, Tang PT, Ouyang Z, Knott A, Jensen F, Han A. 2016. Design and Fabrication of Air-core Inductors for Power Conversion. Poster session presented at 5th International Workshop on Power Supply On Chip, Madrid, Spain.

MLA

Vancouver

Lê Thanh H, Mizushima I, Tang PT, Ouyang Z, Knott A, Jensen F et al. Design and Fabrication of Air-core Inductors for Power Conversion. 2016. Poster session presented at 5th International Workshop on Power Supply On Chip, Madrid, Spain.

Author

Lê Thanh, Hoà ; Mizushima, Io ; Tang, Peter Torben ; Ouyang, Ziwei ; Knott, Arnold ; Jensen, Flemming ; Han, Anpan. / Design and Fabrication of Air-core Inductors for Power Conversion. Poster session presented at 5th International Workshop on Power Supply On Chip, Madrid, Spain.

Bibtex

@conference{0805c2095b074c3794143d446ba71bcf,
title = "Design and Fabrication of Air-core Inductors for Power Conversion",
abstract = "Microelectromechanical systems (MEMS) inductors are used for e.g. RF MEMS and microelectronics. A new application is for power electronics in switched mode power supplies (SMPS). High-performance power inductors, which can be combined with integrated circuits (IC), are required for future power supply on chip (PwrSoC) [1]. Examples of PwrSoC applications are power adaptors for LED illumination and the “Internet of Things”. We report an air-core MEMS inductor. Our process is scalable and universal for making inductors with versatile geometries e.g. spiral, solenoid, toroid, and advanced inductors that are impossible to make by wire-winding technology. As all process temperatures are kept below 200 ºC, the inductors can be integrated into CMOS wafers by MEMS post processing.",
author = "{L{\^e} Thanh}, Ho{\`a} and Io Mizushima and Tang, {Peter Torben} and Ziwei Ouyang and Arnold Knott and Flemming Jensen and Anpan Han",
note = "Poster contribution, PwrSoC 2016; 5th International Workshop on Power Supply On Chip, PwrSoC 2016 ; Conference date: 03-10-2016 Through 05-10-2016",
year = "2016",
language = "English",

}

RIS

TY - CONF

T1 - Design and Fabrication of Air-core Inductors for Power Conversion

AU - Lê Thanh, Hoà

AU - Mizushima, Io

AU - Tang, Peter Torben

AU - Ouyang, Ziwei

AU - Knott, Arnold

AU - Jensen, Flemming

AU - Han, Anpan

N1 - Poster contribution, PwrSoC 2016

PY - 2016

Y1 - 2016

N2 - Microelectromechanical systems (MEMS) inductors are used for e.g. RF MEMS and microelectronics. A new application is for power electronics in switched mode power supplies (SMPS). High-performance power inductors, which can be combined with integrated circuits (IC), are required for future power supply on chip (PwrSoC) [1]. Examples of PwrSoC applications are power adaptors for LED illumination and the “Internet of Things”. We report an air-core MEMS inductor. Our process is scalable and universal for making inductors with versatile geometries e.g. spiral, solenoid, toroid, and advanced inductors that are impossible to make by wire-winding technology. As all process temperatures are kept below 200 ºC, the inductors can be integrated into CMOS wafers by MEMS post processing.

AB - Microelectromechanical systems (MEMS) inductors are used for e.g. RF MEMS and microelectronics. A new application is for power electronics in switched mode power supplies (SMPS). High-performance power inductors, which can be combined with integrated circuits (IC), are required for future power supply on chip (PwrSoC) [1]. Examples of PwrSoC applications are power adaptors for LED illumination and the “Internet of Things”. We report an air-core MEMS inductor. Our process is scalable and universal for making inductors with versatile geometries e.g. spiral, solenoid, toroid, and advanced inductors that are impossible to make by wire-winding technology. As all process temperatures are kept below 200 ºC, the inductors can be integrated into CMOS wafers by MEMS post processing.

M3 - Poster

ER -