Microelectromechanical systems (MEMS) inductors are used for e.g. RF MEMS and microelectronics. A new application is for power electronics in switched mode power supplies (SMPS). High-performance power inductors, which can be combined with integrated circuits (IC), are required for future power supply on chip (PwrSoC) . Examples of PwrSoC applications are power adaptors for LED illumination and the “Internet of Things”. We report an air-core MEMS inductor. Our process is scalable and universal for making inductors with versatile geometries e.g. spiral, solenoid, toroid, and advanced inductors that are impossible to make by wire-winding technology. As all process temperatures are kept below 200 ºC, the inductors can be integrated into CMOS wafers by MEMS post processing.
|Publication status||Published - 2016|
|Event|| 5th International Workshop on Power Supply On Chip - Centro de ELectronica Industrial, Madrid, Spain|
Duration: 3 Oct 2016 → 5 Oct 2016
Conference number: 5
|Conference||5th International Workshop on Power Supply On Chip|
|Location||Centro de ELectronica Industrial|
|Period||03/10/2016 → 05/10/2016|