Design and Fabrication of Air-core Inductors for Power Conversion

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Microelectromechanical systems (MEMS) inductors are used for e.g. RF MEMS and microelectronics. A new application is for power electronics in switched mode power supplies (SMPS). High-performance power inductors, which can be combined with integrated circuits (IC), are required for future power supply on chip (PwrSoC) [1]. Examples of PwrSoC applications are power adaptors for LED illumination and the “Internet of Things”. We report an air-core MEMS inductor. Our process is scalable and universal for making inductors with versatile geometries e.g. spiral, solenoid, toroid, and advanced inductors that are impossible to make by wire-winding technology. As all process temperatures are kept below 200 ºC, the inductors can be integrated into CMOS wafers by MEMS post processing.
Original languageEnglish
Publication date2016
Publication statusPublished - 2016
Event 5th International Workshop on Power Supply On Chip - Centro de ELectronica Industrial, Madrid, Spain
Duration: 3 Oct 20165 Oct 2016
Conference number: 5


Conference 5th International Workshop on Power Supply On Chip
LocationCentro de ELectronica Industrial

Bibliographical note

Poster contribution, PwrSoC 2016


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