Design and Fabrication of Air-core Inductors for Power Conversion

Hoà Lê Thanh, Io Mizushima, Peter Torben Tang, Ziwei Ouyang, Arnold Knott, Flemming Jensen, Anpan Han

Research output: Contribution to conferencePosterResearchpeer-review

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Abstract

Microelectromechanical systems (MEMS) inductors are used for e.g. RF MEMS and microelectronics. A new application is for power electronics in switched mode power supplies (SMPS). High-performance power inductors, which can be combined with integrated circuits (IC), are required for future power supply on chip (PwrSoC) [1]. Examples of PwrSoC applications are power adaptors for LED illumination and the “Internet of Things”. We report an air-core MEMS inductor. Our process is scalable and universal for making inductors with versatile geometries e.g. spiral, solenoid, toroid, and advanced inductors that are impossible to make by wire-winding technology. As all process temperatures are kept below 200 ºC, the inductors can be integrated into CMOS wafers by MEMS post processing.
Original languageEnglish
Publication date2016
Publication statusPublished - 2016
Event 5th International Workshop on Power Supply On Chip - Centro de ELectronica Industrial, Madrid, Spain
Duration: 3 Oct 20165 Oct 2016
Conference number: 5

Conference

Conference 5th International Workshop on Power Supply On Chip
Number5
LocationCentro de ELectronica Industrial
CountrySpain
CityMadrid
Period03/10/201605/10/2016

Bibliographical note

Poster contribution, PwrSoC 2016

Cite this

Lê Thanh, H., Mizushima, I., Tang, P. T., Ouyang, Z., Knott, A., Jensen, F., & Han, A. (2016). Design and Fabrication of Air-core Inductors for Power Conversion. Poster session presented at 5th International Workshop on Power Supply On Chip, Madrid, Spain.