Design and Characterization of Vertical Mesh Capacitors in Standard CMOS

Kåre Tais Christensen

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This paper shows how good RF capacitors can be made in a standard digital CMOS process. The capacitors which are also well suited for binary weighted switched capacitor banks show very good RF performance: Q-values of 57 at 4.0 GHz, a density of 0.27 fF/μ2, 2.2 μm wide shielded unit capacitors, 6% bottom plate capacitance, better than 3-5% process variation and negligible series inductance. Further, a simple yet accurate method is presented that allows hand calculation of the capacitance value.
Original languageEnglish
Title of host publicationDigest of the 2001 IEEE VLSI Circuits Symposium
Place of PublicationKyoto
Publication date2001
ISBN (Print)4-89114-014-3
Publication statusPublished - 2001
EventSymposium on VLSI Circuits - Kyoto
Duration: 1 Jan 2001 → …


ConferenceSymposium on VLSI Circuits
Period01/01/2001 → …

Bibliographical note

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