Depth Profiling by Ion-Beam Spectrometry

P Børgesen, R. Behrisch, B.M.U. Scherzer

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalApplied Physics A: Materials Science & Processing
    Volume27
    Issue number4
    Pages (from-to)183-195
    ISSN0947-8396
    DOIs
    Publication statusPublished - 1982

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