Abstract
In view of developing flexible, highly textured Pb-free piezoelectric thin films, (K,Na)NbO3 was deposited by chemical solution deposition on cube-textured Ni-W alloy substrates. After heat treatment, a strong (001)pc out-of-plane preferential orientation is created in the (K,Na)NbO3
layer, which also exhibits a sharp in-plane texture with 45°-rotated
epitaxial relation to the substrate. The microstructure of the film is
strongly dependent on the heat treatment temperature; sub-micrometer
grains versus up to 2 μm long particles forming at 600 °C and 900 °C
respectively. K4Nb6O17 and (K1−xNax)2Nb4O11 impurity phases were identified depending on the processing temperature.
Original language | English |
---|---|
Journal | Thin Solid Films |
Volume | 650 |
Pages (from-to) | 7-10 |
ISSN | 0040-6090 |
DOIs | |
Publication status | Published - 2018 |
Keywords
- Piezoelectric materials
- Thin films
- Sol-gel preparation
- Texture