Deposition of biopolymer films on micromechanical sensors

Stephan Sylvest Keller, Lene Gammelgaard, Marie P. Jensen, Silvan Schmid, Zachary James Davis, Anja Boisen

    Research output: Contribution to journalConference articleResearchpeer-review

    Abstract

    The influence of various parameters on the spray-coating of thin films of poly(l-lactide) (PLLA) was investigated. The optimized processing conditions were used for deposition of the biodegradable polymer on arrays of SU-8 microcantilevers. The resonance frequency of the cantilevers before and after spray-coating was measured which allowed the characterization of the mechanical properties of the coatings. Initial experiments on enzymatic degradation of the PLLA were performed.
    Original languageEnglish
    JournalMicroelectronic Engineering
    Volume88
    Issue number8
    Pages (from-to)2297-2299
    ISSN0167-9317
    DOIs
    Publication statusPublished - 2011
    Event36th International Conference on Micro- and Nano-Engineering - Genoa, Italy
    Duration: 19 Sep 201022 Sep 2010
    Conference number: 36
    http://www.mne2010.org/

    Conference

    Conference36th International Conference on Micro- and Nano-Engineering
    Number36
    Country/TerritoryItaly
    CityGenoa
    Period19/09/201022/09/2010
    Internet address

    Keywords

    • PLLA
    • SU-8 cantilever
    • Spray-coating
    • Biopolymer

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