"{Deposition and characterization of multilayers on thin foil x-ray

A.M. Hussain, K.D. Joensen, P. Hoeghoej, Finn Erland Christensen, E. Louis, H.J. Voorma, V. Soong, N.E. White, I. Anderson

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Abstract

W/Si and Co/C multilayers have been deposited on epoxy- replicated Au mirrors from the ASTRO-E telescope project, SPectrum Roentgen Gamma (SRG) flight mirrors, DURAN glass substrates and Si witness wafers. A characterization of the multilayers with both hard x-rays and soft x-rays is presented. The roughness value obtained from the Si wafers and the DURAN glass are in the range 3.0-4.2 angstrom and 4.4-4.6 angstrom, respectively. For the epoxy-replicated Au mirrors roughnesses of 5.0-5.8 angstrom are achieved, while the roughness of the SRG flight mirrors are in the range of 8.5-11.0 angstrom. This clearly indicates the effectiveness of the epoxy-replication process for the production of smooth substrates for multilayer deposition to be used in future x-ray telescopes.
Original languageEnglish
Title of host publicationProc. SPIE : Multilayer and Grazing Incidence X-Ray/EUV Optics III
EditorsRichard B. Hoover, Arthur B. Walker
Volume2805
Publication date1996
Pages336-342
Publication statusPublished - 1996
EventSPIE'S 1996 International Symposium on Optical Science, Engineering, and Instrumentation - Denver, United States
Duration: 4 Aug 19969 Aug 1996

Conference

ConferenceSPIE'S 1996 International Symposium on Optical Science, Engineering, and Instrumentation
CountryUnited States
CityDenver
Period04/08/199609/08/1996

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