Abstract
W/Si and Co/C multilayers have been deposited on epoxy- replicated Au mirrors from the ASTRO-E telescope project, SPectrum Roentgen Gamma (SRG) flight mirrors, DURAN glass substrates and Si witness wafers. A characterization of the multilayers with both hard x-rays and soft x-rays is presented. The roughness value obtained from the Si wafers and the DURAN glass are in the range 3.0-4.2 angstrom and 4.4-4.6 angstrom, respectively. For the epoxy-replicated Au mirrors roughnesses of 5.0-5.8 angstrom are achieved, while the roughness of the SRG flight mirrors are in the range of 8.5-11.0 angstrom. This clearly indicates the effectiveness of the epoxy-replication process for the production of smooth substrates for multilayer deposition to be used in future x-ray telescopes.
Original language | English |
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Title of host publication | Proc. SPIE : Multilayer and Grazing Incidence X-Ray/EUV Optics III |
Editors | Richard B. Hoover, Arthur B. Walker |
Volume | 2805 |
Publication date | 1996 |
Pages | 336-342 |
Publication status | Published - 1996 |
Event | SPIE'S 1996 International Symposium on Optical Science, Engineering, and Instrumentation - Denver, United States Duration: 4 Aug 1996 → 9 Aug 1996 |
Conference
Conference | SPIE'S 1996 International Symposium on Optical Science, Engineering, and Instrumentation |
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Country/Territory | United States |
City | Denver |
Period | 04/08/1996 → 09/08/1996 |