Abstract
The invention relates to a mechanical oscillator device comprising an unsupported membrane with a multitude of discrete mass elements distributed to form Phononic crystal cells in the form of regions of additional mass each comprising a plurality of mass elements. The phononic crystal structure has a defect for confining a mechanical oscillation mode having a resonance frequency, f, with the mass elements have a smallest lateral dimension of less than 1/10 of a wavelength of the mechanical oscillation mode. The invention is based on a distribution of tiny additional mass elements providing a periodic density contrast pattern to create the bandgap. This approach keeps the tensile stress uniform which ensures perfect overlap between the tensile stress distribution and mode-shape. This again reduces the damping and thus allows for very high quality factors, Q.
Original language | English |
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IPC | H03H 9/ 24 A I |
Patent number | WO2022195083 |
Filing date | 19/03/2021 |
Country/Territory | International Bureau of the World Intellectual Property Organization (WIPO) |
Priority date | 19/03/2021 |
Priority number | EP20210163818 |
Publication status | Published - 22 Sept 2022 |