Abstract
The invention relates to a mechanical oscillator device comprising an unsupported membrane with a multitude of discrete mass elements distributed to form Phononic crystal cells in the form of regions of additional mass each comprising a plurality of mass elements. The phononic crystal structure has a defect for confining a mechanical oscillation mode having a resonance frequency, f, with the mass elements have a smallest lateral dimension of less than 1/10 of a wavelength of the mechanical oscillation mode. The invention is based on a distribution of tiny additional mass elements providing a periodic density contrast pattern to create the bandgap. This approach keeps the tensile stress uniform which ensures perfect overlap between the tensile stress distribution and mode-shape. This again reduces the damping and thus allows for very high quality factors, Q.
| Original language | English |
|---|---|
| IPC | H03H 9/ 24 A I |
| Patent number | WO2022195083 |
| Filing date | 19/03/2021 |
| Country/Territory | International Bureau of the World Intellectual Property Organization (WIPO) |
| Priority date | 19/03/2021 |
| Priority number | EP20210163818 |
| Publication status | Published - 22 Sep 2022 |