Dense high aspect ratio pillar arrays for carbon MEMS electrodes

Letizia Amato, Rasmus J. Hansen, Arto Heiskanen, Lauge Gammelgard, Tomas Rindzevicius, Rodrigo Martinez-Duarte, Gobind Singh Bisht, Alice Downard, Keith Baronian, Maria Tenje, Marc Madou, Anja Boisen, Jenny Emnéus, Stephan Sylvest Keller

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

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    Original languageEnglish
    Title of host publicationProceedings of the 38th International Conference on Micro and Nano Engineering
    Number of pages1
    Publication date2012
    Publication statusPublished - 2012
    Event38th International Conference on Micro and Nano Engineering - Centre de Congrès Pierre Baudis, Toulouse, France
    Duration: 16 Sep 201220 Sep 2012
    Conference number: 38

    Conference

    Conference38th International Conference on Micro and Nano Engineering
    Number38
    LocationCentre de Congrès Pierre Baudis
    CountryFrance
    CityToulouse
    Period16/09/201220/09/2012

    Keywords

    • 3D microelectrodes
    • Pyrolysed micropillars
    • Carbon MEMS electrodes

    Cite this

    Amato, L., Hansen, R. J., Heiskanen, A., Gammelgard, L., Rindzevicius, T., Martinez-Duarte, R., Singh Bisht, G., Downard, A., Baronian, K., Tenje, M., Madou, M., Boisen, A., Emnéus, J., & Keller, S. S. (2012). Dense high aspect ratio pillar arrays for carbon MEMS electrodes. In Proceedings of the 38th International Conference on Micro and Nano Engineering