Dense high-aspect ratio 3D carbon pillars on interdigitated microelectrode arrays

Letizia Amato, Arto Heiskanen, Rasmus Hansen, Lauge Gammelgaard, Tomas Rindzevicius, Maria Tenje, Jenny Emnéus, Stephan Sylvest Keller

    Research output: Contribution to journalJournal articleResearchpeer-review


    In this work we present high-aspect ratio carbon pillars (1.4 μm in diameter and ∼11 μm in height) on top of interdigitated electrode arrays to be used for electrochemical applications. For this purpose, different types of 2D and 3D pyrolysed carbon structures were fabricated and characterised including surface- and microstructure, electrical and electrochemical properties. A pre-treatment of oxidised Si wafers is introduced to eliminate electrode delamination and ensure structure stability in water during long time-experiments. Additionally, a heat treatment method is reported for regeneration of pyrolysed carbon films with increased film resistance due to oxidation during storage.
    Original languageEnglish
    Pages (from-to)792-803
    Number of pages12
    Publication statusPublished - 2015


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