Dense high-aspect ratio 3D carbon pillars on interdigitated microelectrode arrays

Letizia Amato; Arto Heiskanen; Rasmus Hansen; Lauge Gammelgaard; Tomas Rindzevicius; Maria Tenje; Jenny Emnéus; Stephan Sylvest Keller

doi:10.1016/j.carbon.2015.06.014

Dense high-aspect ratio 3D carbon pillars on interdigitated microelectrode arrays

Letizia Amato, Arto Heiskanen, Rasmus Hansen, Lauge Gammelgaard, Tomas Rindzevicius, Maria Tenje, Jenny Emnéus, Stephan Sylvest Keller

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

In this work we present high-aspect ratio carbon pillars (1.4 μm in diameter and ∼11 μm in height) on top of interdigitated electrode arrays to be used for electrochemical applications. For this purpose, different types of 2D and 3D pyrolysed carbon structures were fabricated and characterised including surface- and microstructure, electrical and electrochemical properties. A pre-treatment of oxidised Si wafers is introduced to eliminate electrode delamination and ensure structure stability in water during long time-experiments. Additionally, a heat treatment method is reported for regeneration of pyrolysed carbon films with increased film resistance due to oxidation during storage.

Original language	English
Journal	Carbon
Volume	94
Pages (from-to)	792-803
Number of pages	12
ISSN	0008-6223
DOIs	https://doi.org/10.1016/j.carbon.2015.06.014
Publication status	Published - 2015

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title = "Dense high-aspect ratio 3D carbon pillars on interdigitated microelectrode arrays",

abstract = "In this work we present high-aspect ratio carbon pillars (1.4 μm in diameter and ∼11 μm in height) on top of interdigitated electrode arrays to be used for electrochemical applications. For this purpose, different types of 2D and 3D pyrolysed carbon structures were fabricated and characterised including surface- and microstructure, electrical and electrochemical properties. A pre-treatment of oxidised Si wafers is introduced to eliminate electrode delamination and ensure structure stability in water during long time-experiments. Additionally, a heat treatment method is reported for regeneration of pyrolysed carbon films with increased film resistance due to oxidation during storage.",

author = "Letizia Amato and Arto Heiskanen and Rasmus Hansen and Lauge Gammelgaard and Tomas Rindzevicius and Maria Tenje and Jenny Emn{\'e}us and Keller, {Stephan Sylvest}",

year = "2015",

doi = "10.1016/j.carbon.2015.06.014",

language = "English",

volume = "94",

pages = "792--803",

journal = "Carbon",

issn = "0008-6223",

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T1 - Dense high-aspect ratio 3D carbon pillars on interdigitated microelectrode arrays

AU - Amato, Letizia

AU - Heiskanen, Arto

AU - Hansen, Rasmus

AU - Gammelgaard, Lauge

AU - Rindzevicius, Tomas

AU - Tenje, Maria

AU - Emnéus, Jenny

AU - Keller, Stephan Sylvest

PY - 2015

Y1 - 2015

N2 - In this work we present high-aspect ratio carbon pillars (1.4 μm in diameter and ∼11 μm in height) on top of interdigitated electrode arrays to be used for electrochemical applications. For this purpose, different types of 2D and 3D pyrolysed carbon structures were fabricated and characterised including surface- and microstructure, electrical and electrochemical properties. A pre-treatment of oxidised Si wafers is introduced to eliminate electrode delamination and ensure structure stability in water during long time-experiments. Additionally, a heat treatment method is reported for regeneration of pyrolysed carbon films with increased film resistance due to oxidation during storage.

AB - In this work we present high-aspect ratio carbon pillars (1.4 μm in diameter and ∼11 μm in height) on top of interdigitated electrode arrays to be used for electrochemical applications. For this purpose, different types of 2D and 3D pyrolysed carbon structures were fabricated and characterised including surface- and microstructure, electrical and electrochemical properties. A pre-treatment of oxidised Si wafers is introduced to eliminate electrode delamination and ensure structure stability in water during long time-experiments. Additionally, a heat treatment method is reported for regeneration of pyrolysed carbon films with increased film resistance due to oxidation during storage.

U2 - 10.1016/j.carbon.2015.06.014

DO - 10.1016/j.carbon.2015.06.014

M3 - Journal article

SN - 0008-6223

VL - 94

SP - 792

EP - 803

JO - Carbon

JF - Carbon

ER -

Dense high-aspect ratio 3D carbon pillars on interdigitated microelectrode arrays

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