Demonstrator realization with basic process: COTECH Deliverable 7.2.1 (CP-IP 214491-2)

Aminul Islam, Thomas Albertin

Research output: Book/ReportReportResearchpeer-review

Original languageEnglish
Place of PublicationVienna
PublisherCOTECH
Number of pages62
Publication statusPublished - 2012
SeriesCOnverging TECHnologies for micro systems manufacturing

Bibliographical note

SP7 - Industrial prototypes and demonstrators, WP7.2 - Process prototyping based on up-scales process chain

Cite this

Islam, A., & Albertin, T. (2012). Demonstrator realization with basic process: COTECH Deliverable 7.2.1 (CP-IP 214491-2). COTECH. COnverging TECHnologies for micro systems manufacturing