Demonstrator realization with basic process: COTECH Deliverable 7.2.1 (CP-IP 214491-2)

Aminul Islam, Thomas Albertin

    Research output: Book/ReportReportResearchpeer-review

    Original languageEnglish
    Place of PublicationVienna
    PublisherCOTECH
    Number of pages62
    Publication statusPublished - 2012
    SeriesCOnverging TECHnologies for micro systems manufacturing

    Bibliographical note

    SP7 - Industrial prototypes and demonstrators, WP7.2 - Process prototyping based on up-scales process chain

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