Demonstrator realization with basic process: COTECH Deliverable 7.2.1 (CP-IP 214491-2)

Research output: Book/ReportReport – Annual report year: 2012Researchpeer-review

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Original languageEnglish
Place of PublicationVienna
PublisherCOTECH
Number of pages62
Publication statusPublished - 2012
SeriesCOnverging TECHnologies for micro systems manufacturing

Bibliographical note

SP7 - Industrial prototypes and demonstrators, WP7.2 - Process prototyping based on up-scales process chain

ID: 9719431