Demonstrator desing for high risk process: COTECH Deliverable 7.1.3 (CP-IP 214491-2)

    Research output: Book/ReportReportResearchpeer-review

    Original languageEnglish
    Place of PublicationVienna
    PublisherCOTECH
    Number of pages49
    Publication statusPublished - 2011
    SeriesCOnverging TECHnologies for micro systems manufacturing

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