| Original language | English |
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| Place of Publication | Vienna |
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| Publisher | COTECH |
| Number of pages | 49 |
| Publication status | Published - 2011 |
| Series | COnverging TECHnologies for micro systems manufacturing |
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Demonstrator desing for high risk process: COTECH Deliverable 7.1.3 (CP-IP 214491-2)
Research output: Book/Report › Report › Research › peer-review