Defect evolution and dopant activation in laser annealed Si and Ge

F. Cristiano, M. Shayesteh, R. Duffy, K. Huet, F. Mazzamuto, Y. Qiu, M. Quillec, H.H. Henrichsen, P. F. Nielsen, Dirch Hjorth Petersen, A. La Magna, G. Caruso, S. Boninelli

    Research output: Contribution to journal › Journal article › Research › peer-review

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