Deep-UV-Lithography: Principles, Optimization, and Simulation

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    Original languageEnglish
    Title of host publicationBook of Abstracts. DTU's Sustain Conference 2015
    Number of pages1
    Place of PublicationLyngby
    PublisherTechnical University of Denmark
    Publication date2015
    Article numberP-9
    Publication statusPublished - 2015
    EventDTU Sustain Conference 2015 - DTU, Lyngby, Denmark
    Duration: 17 Dec 201517 Dec 2015


    ConferenceDTU Sustain Conference 2015
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    Keil, M., Møller, N. P., Khomtchenko, E., & Johansen, L. S. (2015). Deep-UV-Lithography: Principles, Optimization, and Simulation. In Book of Abstracts. DTU's Sustain Conference 2015 [P-9] Technical University of Denmark.