Deep subwavelength photonic multilayers fabricated by atomic layer deposition

Evgeniy Shkondin; Sergei Zhukovsky; Andrei Andryieuski; Osamu Takayama; Radu Malureanu; Mikkel Dysseholm Mar; Andrei Lavrinenko; Flemming Jensen

Deep subwavelength photonic multilayers fabricated by atomic layer deposition

Evgeniy Shkondin, Sergei Zhukovsky, Andrei Andryieuski, Osamu Takayama, Radu Malureanu, Mikkel Dysseholm Mar, Andrei Lavrinenko, Flemming Jensen

Research output: Contribution to conference › Paper › Research › peer-review

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Original language	English
Publication date	2015
Number of pages	1
Publication status	Published - 2015
Event	41st International conference on Micro and Nano Engineering : MNE 2015 - The Hague, Netherlands Duration: 21 Sept 2015 → 24 Sept 2015 Conference number: 41

Conference

Conference	41st International conference on Micro and Nano Engineering
Number	41
Country/Territory	Netherlands
City	The Hague
Period	21/09/2015 → 24/09/2015

Keywords

Atomic layer deposition
Photonic multilayers
Effective medium
Nanofabrication

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Abstract MNE2015 Evgeniy ShkondinFinal published version, 112 KB

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@conference{e3baa04c4a2441279cd2679a549ff1b1,

title = "Deep subwavelength photonic multilayers fabricated by atomic layer deposition",

keywords = "Atomic layer deposition, Photonic multilayers, Effective medium, Nanofabrication",

author = "Evgeniy Shkondin and Sergei Zhukovsky and Andrei Andryieuski and Osamu Takayama and Radu Malureanu and Mar, {Mikkel Dysseholm} and Andrei Lavrinenko and Flemming Jensen",

year = "2015",

language = "English",

note = "41st International conference on Micro and Nano Engineering : MNE 2015, MNE 2015 ; Conference date: 21-09-2015 Through 24-09-2015",

}

TY - CONF

T1 - Deep subwavelength photonic multilayers fabricated by atomic layer deposition

AU - Shkondin, Evgeniy

AU - Zhukovsky, Sergei

AU - Andryieuski, Andrei

AU - Takayama, Osamu

AU - Malureanu, Radu

AU - Mar, Mikkel Dysseholm

AU - Lavrinenko, Andrei

AU - Jensen, Flemming

N1 - Conference code: 41

PY - 2015

Y1 - 2015

KW - Atomic layer deposition

KW - Photonic multilayers

KW - Effective medium

KW - Nanofabrication

M3 - Paper

T2 - 41st International conference on Micro and Nano Engineering

Y2 - 21 September 2015 through 24 September 2015

ER -