Deep subwavelength photonic multilayers fabricated by atomic layer deposition

Evgeniy Shkondin, Sergei Zhukovsky, Andrei Andryieuski, Osamu Takayama, Radu Malureanu, Mikkel Dysseholm Mar, Andrei Lavrinenko, Flemming Jensen

    Research output: Contribution to conferencePaperResearchpeer-review

    177 Downloads (Pure)
    Original languageEnglish
    Publication date2015
    Number of pages1
    Publication statusPublished - 2015
    Event41st International conference on Micro and Nano Engineering : MNE 2015 - The Hague, Netherlands
    Duration: 21 Sep 201524 Sep 2015
    Conference number: 41

    Conference

    Conference41st International conference on Micro and Nano Engineering
    Number41
    Country/TerritoryNetherlands
    CityThe Hague
    Period21/09/201524/09/2015

    Keywords

    • Atomic layer deposition
    • Photonic multilayers
    • Effective medium
    • Nanofabrication

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