Deep subwavelength photonic multilayers fabricated by atomic layer deposition

Evgeniy Shkondin, Sergei Zhukovsky, Andrei Andryieuski, Osamu Takayama, Radu Malureanu, Mikkel Dysseholm Mar, Andrei Lavrinenko, Flemming Jensen

Research output: Contribution to conferencePaperResearchpeer-review

169 Downloads (Pure)
Original languageEnglish
Publication date2015
Number of pages1
Publication statusPublished - 2015
Event41st International conference on Micro and Nano Engineering : MNE 2015 - The Hague, Netherlands
Duration: 21 Sep 201524 Sep 2015
Conference number: 41

Conference

Conference41st International conference on Micro and Nano Engineering
Number41
CountryNetherlands
CityThe Hague
Period21/09/201524/09/2015

Keywords

  • Atomic layer deposition
  • Photonic multilayers
  • Effective medium
  • Nanofabrication

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