Deep silica and silicon etching in silica-on-silicon waveguide technology

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationEuropean Conference on Integrated Optics : Proceedings
VolumePaper ThPo 36
Publication date2005
Pages518-521
Publication statusPublished - 2005
Event12th European Conference on Integrated Optics - Grenoble, France
Duration: 6 Apr 20058 Apr 2005
Conference number: 12

Conference

Conference12th European Conference on Integrated Optics
Number12
CountryFrance
CityGrenoble
Period06/04/200508/04/2005

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