Deep silica and silicon etching in silica-on-silicon waveguide technology

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationEuropean Conference on Integrated Optics : Proceedings
    VolumePaper ThPo 36
    Publication date2005
    Pages518-521
    Publication statusPublished - 2005
    Event12th European Conference on Integrated Optics - Grenoble, France
    Duration: 6 Apr 20058 Apr 2005
    Conference number: 12

    Conference

    Conference12th European Conference on Integrated Optics
    Number12
    Country/TerritoryFrance
    CityGrenoble
    Period06/04/200508/04/2005

    Cite this