Deep reactive ion etching of “grass-free” widely spaced periodic 2D structures

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

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Original languageEnglish
Publication date2019
Publication statusPublished - 2019
Event45th International conference on Micro and Nano Engineering - Rhodes, Greece
Duration: 23 Sep 201926 May 2021

Conference

Conference45th International conference on Micro and Nano Engineering
CountryGreece
CityRhodes
Period23/09/201926/05/2021

Keywords

  • RIE-Lag
  • Silicon dry etching
  • Periodic structures
  • High aspect ratio pillars
  • Sacrificial structures

Cite this

Silvestre, C. M., Jansen, H., & Hansen, O. (2019). Deep reactive ion etching of “grass-free” widely spaced periodic 2D structures. Abstract from 45th International conference on Micro and Nano Engineering, Rhodes, Greece.
Silvestre, Chantal M. ; Jansen, Henri ; Hansen, Ole. / Deep reactive ion etching of “grass-free” widely spaced periodic 2D structures. Abstract from 45th International conference on Micro and Nano Engineering, Rhodes, Greece.
@conference{5ad1ad9a31134b80941322e2f03daec0,
title = "Deep reactive ion etching of “grass-free” widely spaced periodic 2D structures",
keywords = "RIE-Lag, Silicon dry etching, Periodic structures, High aspect ratio pillars, Sacrificial structures",
author = "Silvestre, {Chantal M.} and Henri Jansen and Ole Hansen",
year = "2019",
language = "English",
note = "45th International conference on Micro and Nano Engineering, MNE 2019 ; Conference date: 23-09-2019 Through 26-05-2021",

}

Silvestre, CM, Jansen, H & Hansen, O 2019, 'Deep reactive ion etching of “grass-free” widely spaced periodic 2D structures' 45th International conference on Micro and Nano Engineering, Rhodes, Greece, 23/09/2019 - 26/05/2021, .

Deep reactive ion etching of “grass-free” widely spaced periodic 2D structures. / Silvestre, Chantal M.; Jansen, Henri; Hansen, Ole.

2019. Abstract from 45th International conference on Micro and Nano Engineering, Rhodes, Greece.

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

TY - ABST

T1 - Deep reactive ion etching of “grass-free” widely spaced periodic 2D structures

AU - Silvestre, Chantal M.

AU - Jansen, Henri

AU - Hansen, Ole

PY - 2019

Y1 - 2019

KW - RIE-Lag

KW - Silicon dry etching

KW - Periodic structures

KW - High aspect ratio pillars

KW - Sacrificial structures

M3 - Conference abstract for conference

ER -

Silvestre CM, Jansen H, Hansen O. Deep reactive ion etching of “grass-free” widely spaced periodic 2D structures. 2019. Abstract from 45th International conference on Micro and Nano Engineering, Rhodes, Greece.