Deep reactive ion etching of “grass-free” widely spaced periodic 2D structures

Chantal M. Silvestre, Henri Jansen, Ole Hansen

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

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Original language	English
Publication date	2019
Publication status	Published - 2019
Event	45^th International conference on Micro and Nano Engineering - Rhodos Palace Hotel, Rhodes, Greece Duration: 23 Sept 2019 → 26 Sept 2019

Conference	45^th International conference on Micro and Nano Engineering
Location	Rhodos Palace Hotel
Country/Territory	Greece
City	Rhodes
Period	23/09/2019 → 26/09/2019

Keywords

@conference{5ad1ad9a31134b80941322e2f03daec0,

title = "Deep reactive ion etching of “grass-free” widely spaced periodic 2D structures",

keywords = "RIE-Lag, Silicon dry etching, Periodic structures, High aspect ratio pillars, Sacrificial structures",

author = "Silvestre, {Chantal M.} and Henri Jansen and Ole Hansen",

year = "2019",

language = "English",

note = "45<sup>th</sup> International conference on Micro and Nano Engineering, MNE 2019 ; Conference date: 23-09-2019 Through 26-09-2019",

}

TY - ABST

T1 - Deep reactive ion etching of “grass-free” widely spaced periodic 2D structures

AU - Silvestre, Chantal M.

AU - Jansen, Henri

AU - Hansen, Ole

PY - 2019

Y1 - 2019

KW - RIE-Lag

KW - Silicon dry etching

KW - Periodic structures

KW - High aspect ratio pillars

KW - Sacrificial structures

M3 - Conference abstract for conference

T2 - 45<sup>th</sup> International conference on Micro and Nano Engineering

Y2 - 23 September 2019 through 26 September 2019

ER -