Deep reactive ion etching of “grass-free” widely spaced periodic 2D structures

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Original languageEnglish
Publication date2019
Publication statusPublished - 2019
Event45th International conference on Micro and Nano Engineering - Rhodes, Greece
Duration: 23 Sep 201926 May 2021

Conference

Conference45th International conference on Micro and Nano Engineering
CountryGreece
CityRhodes
Period23/09/201926/05/2021

Keywords

  • RIE-Lag
  • Silicon dry etching
  • Periodic structures
  • High aspect ratio pillars
  • Sacrificial structures

Cite this

Silvestre, C. M., Jansen, H., & Hansen, O. (2019). Deep reactive ion etching of “grass-free” widely spaced periodic 2D structures. Abstract from 45th International conference on Micro and Nano Engineering, Rhodes, Greece.