Deep Reactive Ion Etching for High Aspect Ratio Microelectromechanical Components

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Nordic Semiconductor Meeting Paper 1040
Place of Publication	Tampere, Finland
Publication date	2003
Publication status	Published - 2003

OpenUrl availability

@inproceedings{4f383dfd792f46a4b89df8a844067314,

title = "Deep Reactive Ion Etching for High Aspect Ratio Microelectromechanical Components",

author = "S{\o}ren Jensen and Yalcinkaya, \{Arda Deniz\} and S. Jacobsen and T. Rasmussen and Rasmussen, \{Frank Engel\} and Ole Hansen",

year = "2003",

language = "English",

booktitle = "Nordic Semiconductor Meeting Paper 1040",

}