Original language | English |
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Title of host publication | Nordic Semiconductor Meeting Paper 1040 |
Place of Publication | Tampere, Finland |
Publication date | 2003 |
Publication status | Published - 2003 |
Deep Reactive Ion Etching for High Aspect Ratio Microelectromechanical Components
Søren Jensen, Arda Deniz Yalcinkaya, S. Jacobsen, T. Rasmussen, Frank Engel Rasmussen, Ole Hansen
Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review