Deep glass etched microring resonators based on silica-on-silicon technology

Haiyan Ou; Karsten Rottwitt; Hugh Taylor Philipp

doi:10.1049/el:20060200

Deep glass etched microring resonators based on silica-on-silicon technology

Haiyan Ou, Karsten Rottwitt, Hugh Taylor Philipp

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

Microring resonators fabricated on silica-on-silicon technology using deep glass etching are demonstrated. The fabrication procedures are introduced and the transmission spectrum of a resonator is presented.

Original language	English
Journal	Electronics Letters
Volume	42
Issue number	10
Pages (from-to)	581-583
ISSN	0013-5194
DOIs	https://doi.org/10.1049/el:20060200
Publication status	Published - 2006

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title = "Deep glass etched microring resonators based on silica-on-silicon technology",

abstract = "Microring resonators fabricated on silica-on-silicon technology using deep glass etching are demonstrated. The fabrication procedures are introduced and the transmission spectrum of a resonator is presented.",

author = "Haiyan Ou and Karsten Rottwitt and Philipp, {Hugh Taylor}",

year = "2006",

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AU - Ou, Haiyan

AU - Rottwitt, Karsten

AU - Philipp, Hugh Taylor

PY - 2006

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N2 - Microring resonators fabricated on silica-on-silicon technology using deep glass etching are demonstrated. The fabrication procedures are introduced and the transmission spectrum of a resonator is presented.

AB - Microring resonators fabricated on silica-on-silicon technology using deep glass etching are demonstrated. The fabrication procedures are introduced and the transmission spectrum of a resonator is presented.

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DO - 10.1049/el:20060200

M3 - Journal article

SN - 0013-5194

VL - 42

SP - 581

EP - 583

JO - Electronics Letters

JF - Electronics Letters

IS - 10

ER -

Deep glass etched microring resonators based on silica-on-silicon technology

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