Deep glass etched microring resonators based on silica-on-silicon technology

Haiyan Ou, Karsten Rottwitt, Hugh Taylor Philipp

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

Microring resonators fabricated on silica-on-silicon technology using deep glass etching are demonstrated. The fabrication procedures are introduced and the transmission spectrum of a resonator is presented.
Original languageEnglish
JournalElectronics Letters
Volume42
Issue number10
Pages (from-to)581-583
ISSN0013-5194
DOIs
Publication statusPublished - 2006

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