Customizable nanotweezers for manipulation of free-standing nanostructures

Peter Bøggild; Torben Mikael Hansen; Kristian Mølhave; Anders Hyldgård; M. O. Jensen; Jacob Richter; Lars Montelius; Francois Grey

doi:10.1109/NANO.2001.966399

Customizable nanotweezers for manipulation of free-standing nanostructures

Peter Bøggild
, Torben Mikael Hansen
, Kristian Mølhave
, Anders Hyldgård
, M. O. Jensen
, Jacob Richter
, Lars Montelius
, Francois Grey

Department of Physics

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Abstract

We present a novel nanotweezer device for manipulation and measurement of free-standing nanostructures, where the shape of the tweezer tips can be customized for the application. Electrostatic actuators with submicron interelectrode spacings are fabricated on a batch level using silicon microfabrication techniques. The actuators are capable of opening and closing with respect to the neutral position, and the full range of actuation exceeds 330 nm. The nanotweezer tips are fabricated using electron beam induced deposition; an electron beam of a scanning electron microscope is focused at the ends of the cantilevers, leading to the formation of 40-100 nm diameter carbon-based tips. Careful alignment of the substrate and the beam, as well as proper selection of growth mode, results in converging tips forming nanogaps down to 20 nm. The nanotweezers can be metallized to be used for electrical measurements of nanostructures.

Original language	English
Title of host publication	Proceedings of The 2001 1st IEEE Conference on Nanotechnology
Publisher	IEEE
Publication date	2001
Pages	87-92
ISBN (Print)	0-7803-7215-8
DOIs	https://doi.org/10.1109/NANO.2001.966399
Publication status	Published - 2001
Event	1st IEEE Conference on Nanotechnology - Maui, United States Duration: 30 Oct 2001 → 30 Oct 2001 Conference number: 1 https://ieeexplore.ieee.org/xpl/conhome/7637/proceeding

Conference

Conference	1st IEEE Conference on Nanotechnology
Number	1
Country/Territory	United States
City	Maui
Period	30/10/2001 → 30/10/2001
Internet address	https://ieeexplore.ieee.org/xpl/conhome/7637/proceeding

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Copyright: 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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@inproceedings{2eb3af2cf2f74019a31a2f9d8c9944df,

title = "Customizable nanotweezers for manipulation of free-standing nanostructures",

abstract = "We present a novel nanotweezer device for manipulation and measurement of free-standing nanostructures, where the shape of the tweezer tips can be customized for the application. Electrostatic actuators with submicron interelectrode spacings are fabricated on a batch level using silicon microfabrication techniques. The actuators are capable of opening and closing with respect to the neutral position, and the full range of actuation exceeds 330 nm. The nanotweezer tips are fabricated using electron beam induced deposition; an electron beam of a scanning electron microscope is focused at the ends of the cantilevers, leading to the formation of 40-100 nm diameter carbon-based tips. Careful alignment of the substrate and the beam, as well as proper selection of growth mode, results in converging tips forming nanogaps down to 20 nm. The nanotweezers can be metallized to be used for electrical measurements of nanostructures.",

author = "Peter B{\o}ggild and Hansen, \{Torben Mikael\} and Kristian M{\o}lhave and Anders Hyldg{\aa}rd and Jensen, \{M. O.\} and Jacob Richter and Lars Montelius and Francois Grey",

note = "Copyright: 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE; 1st IEEE Conference on Nanotechnology, NANO 2001 ; Conference date: 30-10-2001 Through 30-10-2001",

year = "2001",

doi = "10.1109/NANO.2001.966399",

language = "English",

isbn = "0-7803-7215-8",

pages = "87--92",

booktitle = "Proceedings of The 2001 1st IEEE Conference on Nanotechnology",

publisher = "IEEE",

address = "United States",

url = "https://ieeexplore.ieee.org/xpl/conhome/7637/proceeding",

}

Bøggild, P, Hansen, TM, Mølhave, K, Hyldgård, A, Jensen, MO, Richter, J, Montelius, L & Grey, F 2001, Customizable nanotweezers for manipulation of free-standing nanostructures. in Proceedings of The 2001 1st IEEE Conference on Nanotechnology. IEEE, pp. 87-92, 1st IEEE Conference on Nanotechnology, Maui, Hawaii, United States, 30/10/2001. https://doi.org/10.1109/NANO.2001.966399

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AU - Bøggild, Peter

AU - Hansen, Torben Mikael

AU - Mølhave, Kristian

AU - Hyldgård, Anders

AU - Jensen, M. O.

AU - Richter, Jacob

AU - Montelius, Lars

AU - Grey, Francois

N1 - Conference code: 1

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N2 - We present a novel nanotweezer device for manipulation and measurement of free-standing nanostructures, where the shape of the tweezer tips can be customized for the application. Electrostatic actuators with submicron interelectrode spacings are fabricated on a batch level using silicon microfabrication techniques. The actuators are capable of opening and closing with respect to the neutral position, and the full range of actuation exceeds 330 nm. The nanotweezer tips are fabricated using electron beam induced deposition; an electron beam of a scanning electron microscope is focused at the ends of the cantilevers, leading to the formation of 40-100 nm diameter carbon-based tips. Careful alignment of the substrate and the beam, as well as proper selection of growth mode, results in converging tips forming nanogaps down to 20 nm. The nanotweezers can be metallized to be used for electrical measurements of nanostructures.

AB - We present a novel nanotweezer device for manipulation and measurement of free-standing nanostructures, where the shape of the tweezer tips can be customized for the application. Electrostatic actuators with submicron interelectrode spacings are fabricated on a batch level using silicon microfabrication techniques. The actuators are capable of opening and closing with respect to the neutral position, and the full range of actuation exceeds 330 nm. The nanotweezer tips are fabricated using electron beam induced deposition; an electron beam of a scanning electron microscope is focused at the ends of the cantilevers, leading to the formation of 40-100 nm diameter carbon-based tips. Careful alignment of the substrate and the beam, as well as proper selection of growth mode, results in converging tips forming nanogaps down to 20 nm. The nanotweezers can be metallized to be used for electrical measurements of nanostructures.

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M3 - Article in proceedings

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BT - Proceedings of The 2001 1st IEEE Conference on Nanotechnology

PB - IEEE

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ER -

Customizable nanotweezers for manipulation of free-standing nanostructures

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