Critical factors in SEM 3D stereo microscopy

F. Marinello, P. Bariano, E. Savio, Andy Horsewell

Research output: Contribution to journalJournal articlepeer-review

Abstract

This work addresses dimensional measurements performed with the scanning electron microscope (SEM) using 3D reconstruction of surface topography through stereo-photogrammetry. The paper presents both theoretical and experimental investigations, on the effects of instrumental variables and measurement parameters on reconstruction accuracy. Investigations were performed on a novel sample, specifically developed and implemented for the tests. The description is based on the model function introduced by Piazzesi and adapted for eucentrically tilted stereopairs. Two main classes of influencing factors are recognized: the first one is related to the measurement operation and the instrument set-up; the second concerns the quality of scanned images and represents the major criticality in the application of SEMs for 3D characterizations.
Original languageEnglish
JournalMeasurement Science and Technology
Volume19
Issue number6
Pages (from-to)065705
ISSN0957-0233
DOIs
Publication statusPublished - 2008

Keywords

  • traceability
  • stereoscopy
  • surface reconstruction
  • stereo-pair technique
  • SEM

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