Correction of systematic behaviour in topographical surface analysis

Danilo Quagliotti; Federico Baruffi; Guido Tosello; S. Gasparin; M. Annoni; P. Parenti; Rene Sobiecki; Hans Nørgaard Hansen

doi:10.3850/978-981-11-0749-8_738

Correction of systematic behaviour in topographical surface analysis

Danilo Quagliotti
, Federico Baruffi
, Guido Tosello
, S. Gasparin
, M. Annoni
, P. Parenti
, Rene Sobiecki
, Hans Nørgaard Hansen

Lego Group
Polytechnic University of Milan

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Abstract

Four specimens in the sub-micrometre range and with different polishing were topographically investigated in fiveareas over their respective surfaces. Uncertainties were evaluated with and without correction for systematicbehaviour and successively analysed by a design of experiment (DOE). Results showed that the correction forsystematic behaviour allowed for a lower value of the estimated uncertainty when the correction was adequate tocompletely recognise the systematic effects. If not, the correction can produce an overestimation of the uncertainty.

Original language	English
Title of host publication	Proceedings of the 11th International Conference on Multi-Material Micro Manufacture (4M2016) : co-organised with 10th International Workshop on Microfactories (IWMF2016)
Publisher	Research Publishing Services
Publication date	2016
Pages	277-280
ISBN (Print)	978-981-11-0749-8
DOIs	https://doi.org/10.3850/978-981-11-0749-8_738
Publication status	Published - 2016
Event	4M/IWMF 2016 Conference - Technical University of Copenhagen, Kgs. Lyngby, Denmark Duration: 13 Sept 2016 → 15 Sept 2016 http://www.4m-association.org/

Conference

Conference	4M/IWMF 2016 Conference
Location	Technical University of Copenhagen
Country/Territory	Denmark
City	Kgs. Lyngby
Period	13/09/2016 → 15/09/2016
Internet address	http://www.4m-association.org/

Keywords

Systematics
Systematic effects
Surface analysis
Topography
DOE

Access to Document

10.3850/978-981-11-0749-8_738

Proceedings 738Final published version, 191 KB

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Quagliotti, D., Baruffi, F., Tosello, G., Gasparin, S., Annoni, M., Parenti, P., Sobiecki, R., & Hansen, H. N. (2016). Correction of systematic behaviour in topographical surface analysis. In Proceedings of the 11th International Conference on Multi-Material Micro Manufacture (4M2016) : co-organised with 10th International Workshop on Microfactories (IWMF2016) (pp. 277-280). Research Publishing Services. https://doi.org/10.3850/978-981-11-0749-8_738

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title = "Correction of systematic behaviour in topographical surface analysis",

abstract = "Four specimens in the sub-micrometre range and with different polishing were topographically investigated in fiveareas over their respective surfaces. Uncertainties were evaluated with and without correction for systematicbehaviour and successively analysed by a design of experiment (DOE). Results showed that the correction forsystematic behaviour allowed for a lower value of the estimated uncertainty when the correction was adequate tocompletely recognise the systematic effects. If not, the correction can produce an overestimation of the uncertainty.",

keywords = "Systematics, Systematic effects, Surface analysis, Topography, DOE",

author = "Danilo Quagliotti and Federico Baruffi and Guido Tosello and S. Gasparin and M. Annoni and P. Parenti and Rene Sobiecki and Hansen, \{Hans N{\o}rgaard\}",

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booktitle = "Proceedings of the 11th International Conference on Multi-Material Micro Manufacture (4M2016) : co-organised with 10th International Workshop on Microfactories (IWMF2016)",

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note = "4M/IWMF 2016 Conference ; Conference date: 13-09-2016 Through 15-09-2016",

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Quagliotti, D, Baruffi, F, Tosello, G, Gasparin, S, Annoni, M, Parenti, P, Sobiecki, R & Hansen, HN 2016, Correction of systematic behaviour in topographical surface analysis. in Proceedings of the 11th International Conference on Multi-Material Micro Manufacture (4M2016) : co-organised with 10th International Workshop on Microfactories (IWMF2016). Research Publishing Services, pp. 277-280, 4M/IWMF 2016 Conference, Kgs. Lyngby, Denmark, 13/09/2016. https://doi.org/10.3850/978-981-11-0749-8_738

Correction of systematic behaviour in topographical surface analysis. / Quagliotti, Danilo; Baruffi, Federico; Tosello, Guido et al.
Proceedings of the 11th International Conference on Multi-Material Micro Manufacture (4M2016) : co-organised with 10th International Workshop on Microfactories (IWMF2016). Research Publishing Services, 2016. p. 277-280.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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AU - Baruffi, Federico

AU - Tosello, Guido

AU - Gasparin, S.

AU - Annoni, M.

AU - Parenti, P.

AU - Sobiecki, Rene

AU - Hansen, Hans Nørgaard

PY - 2016

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KW - Systematic effects

KW - Surface analysis

KW - Topography

KW - DOE

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DO - 10.3850/978-981-11-0749-8_738

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BT - Proceedings of the 11th International Conference on Multi-Material Micro Manufacture (4M2016) : co-organised with 10th International Workshop on Microfactories (IWMF2016)

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Quagliotti D, Baruffi F, Tosello G, Gasparin S, Annoni M, Parenti P et al. Correction of systematic behaviour in topographical surface analysis. In Proceedings of the 11th International Conference on Multi-Material Micro Manufacture (4M2016) : co-organised with 10th International Workshop on Microfactories (IWMF2016). Research Publishing Services. 2016. p. 277-280 doi: 10.3850/978-981-11-0749-8_738

Correction of systematic behaviour in topographical surface analysis

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