Correction of systematic behaviour in topographical surface analysis

Danilo Quagliotti, Federico Baruffi, Guido Tosello, S. Gasparin, M. Annoni, P. Parenti, Rene Sobiecki, Hans Nørgaard Hansen

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    Abstract

    Four specimens in the sub-micrometre range and with different polishing were topographically investigated in fiveareas over their respective surfaces. Uncertainties were evaluated with and without correction for systematicbehaviour and successively analysed by a design of experiment (DOE). Results showed that the correction forsystematic behaviour allowed for a lower value of the estimated uncertainty when the correction was adequate tocompletely recognise the systematic effects. If not, the correction can produce an overestimation of the uncertainty.
    Original languageEnglish
    Title of host publicationProceedings of the 11th International Conference on Multi-Material Micro Manufacture (4M2016) : co-organised with 10th International Workshop on Microfactories (IWMF2016)
    PublisherResearch Publishing Services
    Publication date2016
    Pages277-280
    ISBN (Print)978-981-11-0749-8
    DOIs
    Publication statusPublished - 2016
    Event4M/IWMF 2016 Conference - Technical University of Copenhagen, Kgs. Lyngby, Denmark
    Duration: 13 Sept 201615 Sept 2016
    http://www.4m-association.org/

    Conference

    Conference4M/IWMF 2016 Conference
    LocationTechnical University of Copenhagen
    Country/TerritoryDenmark
    CityKgs. Lyngby
    Period13/09/201615/09/2016
    Internet address

    Keywords

    • Systematics
    • Systematic effects
    • Surface analysis
    • Topography
    • DOE

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