Abstract
Four specimens in the sub-micrometre range and with different polishing were topographically investigated in fiveareas over their respective surfaces. Uncertainties were evaluated with and without correction for systematicbehaviour and successively analysed by a design of experiment (DOE). Results showed that the correction forsystematic behaviour allowed for a lower value of the estimated uncertainty when the correction was adequate tocompletely recognise the systematic effects. If not, the correction can produce an overestimation of the uncertainty.
Original language | English |
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Title of host publication | Proceedings of the 11th International Conference on Multi-Material Micro Manufacture (4M2016) : co-organised with 10th International Workshop on Microfactories (IWMF2016) |
Publisher | Research Publishing Services |
Publication date | 2016 |
Pages | 277-280 |
ISBN (Print) | 978-981-11-0749-8 |
DOIs | |
Publication status | Published - 2016 |
Event | 4M/IWMF 2016 Conference - Technical University of Copenhagen, Kgs. Lyngby, Denmark Duration: 13 Sept 2016 → 15 Sept 2016 http://www.4m-association.org/ |
Conference
Conference | 4M/IWMF 2016 Conference |
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Location | Technical University of Copenhagen |
Country/Territory | Denmark |
City | Kgs. Lyngby |
Period | 13/09/2016 → 15/09/2016 |
Internet address |
Keywords
- Systematics
- Systematic effects
- Surface analysis
- Topography
- DOE