Correction of systematic behaviour in topographical surface analysis

Danilo Quagliotti, Federico Baruffi, Guido Tosello, S. Gasparin, M. Annoni, P. Parenti, Rene Sobiecki, Hans Nørgaard Hansen

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Four specimens in the sub-micrometre range and with different polishing were topographically investigated in fiveareas over their respective surfaces. Uncertainties were evaluated with and without correction for systematicbehaviour and successively analysed by a design of experiment (DOE). Results showed that the correction forsystematic behaviour allowed for a lower value of the estimated uncertainty when the correction was adequate tocompletely recognise the systematic effects. If not, the correction can produce an overestimation of the uncertainty.
Original languageEnglish
Title of host publicationProceedings of the 11th International Conference on Multi-Material Micro Manufacture (4M2016) : co-organised with 10th International Workshop on Microfactories (IWMF2016)
PublisherResearch Publishing Services
Publication date2016
ISBN (Print)978-981-11-0749-8
Publication statusPublished - 2016
Event4M/IWMF 2016 Conference - Technical University of Copenhagen, Kgs. Lyngby, Denmark
Duration: 13 Sep 201615 Sep 2016


Conference4M/IWMF 2016 Conference
LocationTechnical University of Copenhagen
CityKgs. Lyngby
Internet address


  • Systematics
  • Systematic effects
  • Surface analysis
  • Topography
  • DOE


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