Controlling the ion flux on substrates of different geometry by sheath-lens focusing effect

Eugen Stamate (Invited author), H. Sugai (Invited author)

    Research output: Contribution to journalConference articleResearchpeer-review

    Original languageEnglish
    JournalThin Solid Films
    Volume515
    Pages (from-to)4853-4859
    ISSN0040-6090
    DOIs
    Publication statusPublished - 2007
    Event3rd International Symposium on Dry Process - DPS 2005 - Jeju, Korea, Republic of
    Duration: 28 Nov 200530 Nov 2005

    Conference

    Conference3rd International Symposium on Dry Process - DPS 2005
    CountryKorea, Republic of
    CityJeju
    Period28/11/200530/11/2005

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