Controlling the ion flux on substrates of different geometry by sheath-lens focusing effect

Eugen Stamate (Invited author), H. Sugai (Invited author)

Research output: Contribution to journal › Conference article › Research › peer-review

Original language	English
Journal	Thin Solid Films
Volume	515
Pages (from-to)	4853-4859
ISSN	0040-6090
DOIs	https://doi.org/10.1016/j.tsf.2006.10.071
Publication status	Published - 2007
Event	3rd International Symposium on Dry Process - DPS 2005 - Jeju, Korea, Republic of Duration: 28 Nov 2005 → 30 Nov 2005

Conference	3rd International Symposium on Dry Process - DPS 2005
Country/Territory	Korea, Republic of
City	Jeju
Period	28/11/2005 → 30/11/2005

Access to Document

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title = "Controlling the ion flux on substrates of different geometry by sheath-lens focusing effect",

keywords = "Energiteknologier p{\aa} vej",

author = "Eugen Stamate and H. Sugai",

year = "2007",

doi = "10.1016/j.tsf.2006.10.071",

language = "English",

volume = "515",

pages = "4853--4859",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

note = "3rd International Symposium on Dry Process - DPS 2005 ; Conference date: 28-11-2005 Through 30-11-2005",

}

TY - GEN

T1 - Controlling the ion flux on substrates of different geometry by sheath-lens focusing effect

AU - Stamate, Eugen

AU - Sugai, H.

PY - 2007

Y1 - 2007

KW - Energiteknologier på vej

U2 - 10.1016/j.tsf.2006.10.071

DO - 10.1016/j.tsf.2006.10.071

M3 - Conference article

SN - 0040-6090

VL - 515

SP - 4853

EP - 4859

JO - Thin Solid Films

JF - Thin Solid Films

T2 - 3rd International Symposium on Dry Process - DPS 2005

Y2 - 28 November 2005 through 30 November 2005

ER -