Contactless graphene conductance measurements: the effect of device fabrication on terahertz time-domain spectroscopy

David Mackenzie, Jonas Christian Due Buron, Peter Bøggild, Peter Uhd Jepsen, Dirch Hjorth Petersen

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Abstract

We perform contactless full-wafer maps of the electrical conductance of a 4-inch wafer of single-layer CVD graphene using terahertz time-domain spectroscopy both before and after deposition of metal contacts and fabrication of devices via laser ablation. We find that there is no significant change in the measured conductance of graphene before and after device fabrication. We also show that precise terahertz time-domain spectroscopy can be performed when the beam spot is at sufficient distance (>1.2 mm) from metal contacts.
Original languageEnglish
JournalInternational Journal of Nanotechnology
Volume13
Issue number8-9
Pages (from-to)591-596
ISSN1475-7435
DOIs
Publication statusPublished - 2016

Keywords

  • CVD graphene
  • Terahertz time-domain spectroscopy
  • Laser ablation
  • T-ray

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