Conformal coating by photorists of sharp corners of
                anisotropically etched throughholes in silicon

Matthias Heschel, Siebe Bouwstra

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Sensors and Actuators. A, Physical
Volume	70
Issue number	1-2
Pages (from-to)	75-80
Publication status	Published - 1998

OpenUrl availability

@article{36de3696c6e84d9f925b41d98d1156f4,

title = "Conformal coating by photorists of sharp corners of anisotropically etched throughholes in silicon",

author = "Matthias Heschel and Siebe Bouwstra",

year = "1998",

language = "English",

volume = "70",

pages = "75--80",

journal = "Sensors and Actuators. A, Physical",

issn = "1873-3069",

publisher = "Elsevier",

number = "1-2",

}