Compliant thermal microactuators

Jacques Jonsmann, Ole Sigmund, Siebe Bouwstra

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Abstract

    Two dimensional compliant metallic thermal microactuators are designed using topology optimisation, and microfabricated using rapid prototyping techniques. Structures are characterised using advanced image analysis, yielding a very high precision. Characterised structures behave in a way which can be explained from the design predictions.
    Original languageEnglish
    Title of host publicationProceedings of the 12th European Eurosensors XII conference
    Volume1-2
    PublisherIOP Publishing
    Publication date1999
    Pages395-398
    ISBN (Print)0-7503-0536-3
    Publication statusPublished - 1999
    EventEurosensors XII Meeting - Southampton, United Kingdom
    Duration: 13 Sept 199816 Sept 1998
    Conference number: 12

    Conference

    ConferenceEurosensors XII Meeting
    Number12
    Country/TerritoryUnited Kingdom
    CitySouthampton
    Period13/09/199816/09/1998
    SeriesSensors Series
    ISSN0964-0339

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