Compliant thermal microactuators

Jacques Jonsmann, Ole Sigmund, Siebe Bouwstra

    Research output: Contribution to journalConference articleResearchpeer-review

    Abstract

    Two dimensional compliant metallic thermal microactuators are designed using topology optimisation, and microfabricated using rapid prototyping techniques. Structures are characterised using advanced image analysis, yielding a very high precision. Characterised structures behave in accordance with the intended behaviour. (C) 1999 Elsevier Science S.A. All rights reserved.
    Original languageEnglish
    JournalSensors and Actuators A: Physical
    Volume76
    Issue number1-3
    Pages (from-to)463-469
    ISSN0924-4247
    DOIs
    Publication statusPublished - 30 Aug 1999
    EventEurosensors XII Meeting - Southampton, United Kingdom
    Duration: 13 Sep 199816 Sep 1998
    Conference number: 12

    Conference

    ConferenceEurosensors XII Meeting
    Number12
    CountryUnited Kingdom
    CitySouthampton
    Period13/09/199816/09/1998

    Keywords

    • compliant
    • thermal
    • microactuators
    • topology optimisation
    • fast prototyping

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