Compliant thermal microactuators

Jacques Jonsmann; Ole Sigmund; Siebe Bouwstra

doi:10.1016/S0924-4247(99)00011-4

Compliant thermal microactuators

Jacques Jonsmann, Ole Sigmund, Siebe Bouwstra

Research output: Contribution to journal › Conference article › Research › peer-review

Abstract

Two dimensional compliant metallic thermal microactuators are designed using topology optimisation, and microfabricated using rapid prototyping techniques. Structures are characterised using advanced image analysis, yielding a very high precision. Characterised structures behave in accordance with the intended behaviour. (C) 1999 Elsevier Science S.A. All rights reserved.

Original language	English
Journal	Sensors and Actuators A: Physical
Volume	76
Issue number	1-3
Pages (from-to)	463-469
ISSN	0924-4247
DOIs	https://doi.org/10.1016/S0924-4247(99)00011-4
Publication status	Published - 30 Aug 1999
Event	Eurosensors XII Meeting - Southampton, United Kingdom Duration: 13 Sept 1998 → 16 Sept 1998 Conference number: 12

Conference

Conference	Eurosensors XII Meeting
Number	12
Country/Territory	United Kingdom
City	Southampton
Period	13/09/1998 → 16/09/1998

Keywords

compliant
thermal
microactuators
topology optimisation
fast prototyping

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10.1016/S0924-4247(99)00011-4

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title = "Compliant thermal microactuators",

abstract = "Two dimensional compliant metallic thermal microactuators are designed using topology optimisation, and microfabricated using rapid prototyping techniques. Structures are characterised using advanced image analysis, yielding a very high precision. Characterised structures behave in accordance with the intended behaviour. (C) 1999 Elsevier Science S.A. All rights reserved.",

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N2 - Two dimensional compliant metallic thermal microactuators are designed using topology optimisation, and microfabricated using rapid prototyping techniques. Structures are characterised using advanced image analysis, yielding a very high precision. Characterised structures behave in accordance with the intended behaviour. (C) 1999 Elsevier Science S.A. All rights reserved.

AB - Two dimensional compliant metallic thermal microactuators are designed using topology optimisation, and microfabricated using rapid prototyping techniques. Structures are characterised using advanced image analysis, yielding a very high precision. Characterised structures behave in accordance with the intended behaviour. (C) 1999 Elsevier Science S.A. All rights reserved.

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KW - thermal

KW - microactuators

KW - topology optimisation

KW - fast prototyping

U2 - 10.1016/S0924-4247(99)00011-4

DO - 10.1016/S0924-4247(99)00011-4

M3 - Conference article

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ER -

Compliant thermal microactuators

Abstract

Conference

Keywords

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