Compliant electro-thermal microactuators.

Jacques Jonsmann; Ole Sigmund; Siebe Bouwstra

doi:10.1109/MEMSYS.1999.746894

Compliant electro-thermal microactuators.

Jacques Jonsmann
, Ole Sigmund
, Siebe Bouwstra

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Abstract

This paper describes design, microfabrication and characterisation of topology optimised compliant electro-thermal microactuators. The actuators are fabricated by a fast prototyping process using laser micromachining and electroplating. Actuators are characterised with respect to displacement, force and work, by use of image analysis. Four different actuators are presented. These actuators are capable of displacements of 30 μm and forces of 15 mN. The most recent actuator designs function in reasonable accordance with design predictions.

Original language	English
Title of host publication	Twelfth IEEE International Conference on Micro Electro Mechanical Systems, 1999. MEMS '99.
Publisher	IEEE
Publication date	1999
Pages	588-593
ISBN (Print)	0780351940
DOIs	https://doi.org/10.1109/MEMSYS.1999.746894
Publication status	Published - 1999
Event	1999 12th IEEE International Conference on Micro Electro Mechanical Systems - Orlando, United States Duration: 21 Jan 1999 → 21 Jan 1999 Conference number: 12 https://ieeexplore.ieee.org/xpl/conhome/6037/proceeding

Conference

Conference	1999 12th IEEE International Conference on Micro Electro Mechanical Systems
Number	12
Country/Territory	United States
City	Orlando
Period	21/01/1999 → 21/01/1999
Internet address	https://ieeexplore.ieee.org/xpl/conhome/6037/proceeding

Bibliographical note

Copyright 1999 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

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title = "Compliant electro-thermal microactuators.",

abstract = "This paper describes design, microfabrication and characterisation of topology optimised compliant electro-thermal microactuators. The actuators are fabricated by a fast prototyping process using laser micromachining and electroplating. Actuators are characterised with respect to displacement, force and work, by use of image analysis. Four different actuators are presented. These actuators are capable of displacements of 30 μm and forces of 15 mN. The most recent actuator designs function in reasonable accordance with design predictions.",

author = "Jacques Jonsmann and Ole Sigmund and Siebe Bouwstra",

note = "Copyright 1999 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.; 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 ; Conference date: 21-01-1999 Through 21-01-1999",

year = "1999",

doi = "10.1109/MEMSYS.1999.746894",

language = "English",

isbn = "0780351940",

pages = "588--593",

booktitle = "Twelfth IEEE International Conference on Micro Electro Mechanical Systems, 1999. MEMS '99.",

publisher = "IEEE",

address = "United States",

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AU - Sigmund, Ole

AU - Bouwstra, Siebe

N1 - Conference code: 12

PY - 1999

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N2 - This paper describes design, microfabrication and characterisation of topology optimised compliant electro-thermal microactuators. The actuators are fabricated by a fast prototyping process using laser micromachining and electroplating. Actuators are characterised with respect to displacement, force and work, by use of image analysis. Four different actuators are presented. These actuators are capable of displacements of 30 μm and forces of 15 mN. The most recent actuator designs function in reasonable accordance with design predictions.

AB - This paper describes design, microfabrication and characterisation of topology optimised compliant electro-thermal microactuators. The actuators are fabricated by a fast prototyping process using laser micromachining and electroplating. Actuators are characterised with respect to displacement, force and work, by use of image analysis. Four different actuators are presented. These actuators are capable of displacements of 30 μm and forces of 15 mN. The most recent actuator designs function in reasonable accordance with design predictions.

U2 - 10.1109/MEMSYS.1999.746894

DO - 10.1109/MEMSYS.1999.746894

M3 - Article in proceedings

SN - 0780351940

SP - 588

EP - 593

BT - Twelfth IEEE International Conference on Micro Electro Mechanical Systems, 1999. MEMS '99.

PB - IEEE

T2 - 1999 12th IEEE International Conference on Micro Electro Mechanical Systems

Y2 - 21 January 1999 through 21 January 1999

ER -

Compliant electro-thermal microactuators.

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