Compliant electro-thermal microactuators.

Jacques Jonsmann, Ole Sigmund, Siebe Bouwstra

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    Abstract

    This paper describes design, microfabrication and characterisation of topology optimised compliant electro-thermal microactuators. The actuators are fabricated by a fast prototyping process using laser micromachining and electroplating. Actuators are characterised with respect to displacement, force and work, by use of image analysis. Four different actuators are presented. These actuators are capable of displacements of 30 μm and forces of 15 mN. The most recent actuator designs function in reasonable accordance with design predictions.
    Original languageEnglish
    Title of host publicationTwelfth IEEE International Conference on Micro Electro Mechanical Systems, 1999. MEMS '99.
    PublisherIEEE
    Publication date1999
    Pages588-593
    ISBN (Print)0780351940
    DOIs
    Publication statusPublished - 1999
    EventTechnical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems -
    Duration: 1 Jan 1999 → …

    Conference

    ConferenceTechnical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems
    Period01/01/1999 → …

    Bibliographical note

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