Competition between the Thermal Gradient and the Bimorph Effect in Locally Heated MEMS Actuators

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    Abstract

    We have investigated the influence of thermal gradient effects in inhomogeneously heated MEMS/NEMS. The actuation perturbations caused by thermal gradients have been studied through static optothermal actuation experiments of a bi-material polymer based cantilever and supported by finite element modeling. As a result, bidirectional bending has been experimentally observed and interpreted as the competition between bimorph and thermal gradient effects. The competition has illustrated the importance of including the thermal gradient effect in the behavior analysis of bimorph driven MEMS/NEMS devices.
    Original languageEnglish
    JournalJournal of Micromechanics and Microengineering
    Volume19
    Issue number1
    Pages (from-to)015008
    ISSN0960-1317
    DOIs
    Publication statusPublished - 2009

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