Abstract
We have investigated the influence of thermal gradient effects in inhomogeneously heated MEMS/NEMS. The actuation perturbations caused by thermal gradients have been studied through static optothermal actuation experiments of a bi-material polymer based cantilever and supported by finite element modeling. As a result, bidirectional bending has been experimentally observed and interpreted as the competition between bimorph and thermal gradient effects. The competition has illustrated the importance of including the thermal gradient effect in the behavior analysis of bimorph driven MEMS/NEMS devices.
| Original language | English |
|---|---|
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 19 |
| Issue number | 1 |
| Pages (from-to) | 015008 |
| ISSN | 0960-1317 |
| DOIs | |
| Publication status | Published - 2009 |