Compatibility of iridium thin films with the silicon pore optics technology for Athena

S. Svendsen*, D. D.M. Ferreira, S. Massahi, P. L. Henriksen, N. C. Gellert, A. S'jegers, F. E. Christensen, B. Landgraf, A. Thete, M. Collon, I. Ferreira, B. Shortt, M. Bavdaz

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

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    The development of high-quality thin film coatings for the Athena X-ray optics is progressing, following the commissioning of an industrial scale coating facility. The assembly of silicon pore optics into mirror modules for the Athena telescope requires wet-chemical exposure of coated mirror plates to prepare bonding areas for stacking, as well as an annealing step to improve bond strength. It is therefore critical to evaluate how these post-coating processes could affect the mirror coating performance and stability. We present X-ray reflectometry characterization of iridium thin films deposited on photoresist patterned Silicon Pore Optics plates to investigate the compatibility with the stacking process steps for the manufacturing of the Athena optics.

    Original languageEnglish
    Title of host publicationProceedings of SPIE : Optics for EUV, X-Ray, and Gamma-Ray Astronomy X
    EditorsStephen L. O'Dell, Jessica A. Gaskin, Giovanni Pareschi
    Number of pages6
    PublisherSPIE - International Society for Optical Engineering
    Publication date2021
    Article number118220C
    ISBN (Electronic)9781510644823
    Publication statusPublished - 2021
    EventSPIE Optical Engineering + Applications 2021 - San Diego, United States
    Duration: 1 Aug 20215 Aug 2021


    ConferenceSPIE Optical Engineering + Applications 2021
    Country/TerritoryUnited States
    CitySan Diego
    SeriesProceedings of SPIE - The International Society for Optical Engineering


    • Athena
    • Iridium
    • Silicon Pore Optics
    • Thin film
    • X-ray optics


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