Compatibility of iridium thin films with the silicon pore optics technology for Athena

S. Svendsen*, D. D.M. Ferreira, S. Massahi, P. L. Henriksen, N. C. Gellert, A. S'jegers, F. E. Christensen, B. Landgraf, A. Thete, M. Collon, I. Ferreira, B. Shortt, M. Bavdaz

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

19 Downloads (Pure)


The development of high-quality thin film coatings for the Athena X-ray optics is progressing, following the commissioning of an industrial scale coating facility. The assembly of silicon pore optics into mirror modules for the Athena telescope requires wet-chemical exposure of coated mirror plates to prepare bonding areas for stacking, as well as an annealing step to improve bond strength. It is therefore critical to evaluate how these post-coating processes could affect the mirror coating performance and stability. We present X-ray reflectometry characterization of iridium thin films deposited on photoresist patterned Silicon Pore Optics plates to investigate the compatibility with the stacking process steps for the manufacturing of the Athena optics.

Original languageEnglish
Title of host publicationProceedings of SPIE : Optics for EUV, X-Ray, and Gamma-Ray Astronomy X
EditorsStephen L. O'Dell, Jessica A. Gaskin, Giovanni Pareschi
Number of pages6
PublisherSPIE - International Society for Optical Engineering
Publication date2021
Article number118220C
ISBN (Electronic)9781510644823
Publication statusPublished - 2021
EventSPIE Optical Engineering + Applications 2021 - San Diego, United States
Duration: 1 Aug 20215 Aug 2021


ConferenceSPIE Optical Engineering + Applications 2021
Country/TerritoryUnited States
CitySan Diego
SeriesProceedings of SPIE - The International Society for Optical Engineering


  • Athena
  • Iridium
  • Silicon Pore Optics
  • Thin film
  • X-ray optics


Dive into the research topics of 'Compatibility of iridium thin films with the silicon pore optics technology for Athena'. Together they form a unique fingerprint.

Cite this