Comparison of several methods for chemical modification and micropatterning of the SU-8 photoresist

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Research › peer-review

Original language	English
Title of host publication	MNE - 33rd International Conference on Micro and Nano Engineering
Publication date	2007
Pages	283-284
Publication status	Published - 2007
Event	33rd International Conference on Micro- and Nano-Engineering - Copenhagen, Denmark Duration: 23 Sept 2007 → 26 Sept 2007 Conference number: 33 http://www.mne07.org/

Conference	33rd International Conference on Micro- and Nano-Engineering
Number	33
Country/Territory	Denmark
City	Copenhagen
Period	23/09/2007 → 26/09/2007
Internet address	http://www.mne07.org/

OpenUrl availability

@inbook{b7dca14564f04067ad252c7e05d4e96b,

title = "Comparison of several methods for chemical modification and micropatterning of the SU-8 photoresist",

author = "Gabriela Blagoi and Keller, \{Stephan Urs\} and Dufva, \{Hans Martin\} and Anja Boisen",

year = "2007",

language = "English",

pages = "283--284",

booktitle = "MNE - 33rd International Conference on Micro and Nano Engineering",

note = "33rd International Conference on Micro- and Nano-Engineering, MNE07 ; Conference date: 23-09-2007 Through 26-09-2007",

url = "http://www.mne07.org/",

}

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Research › peer-review

TY - ABST

T1 - Comparison of several methods for chemical modification and micropatterning of the SU-8 photoresist

AU - Blagoi, Gabriela

AU - Keller, Stephan Urs

AU - Dufva, Hans Martin

AU - Boisen, Anja

N1 - Conference code: 33

PY - 2007

Y1 - 2007

M3 - Conference abstract in proceedings

SP - 283

EP - 284

BT - MNE - 33rd International Conference on Micro and Nano Engineering

T2 - 33rd International Conference on Micro- and Nano-Engineering

Y2 - 23 September 2007 through 26 September 2007

ER -