Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology

Helia Hooshmand*, Tobias Pahl, Poul Erik Hansen, Liwei Fu, Alexander Birk, Mirza Karamehmedović, Peter Lehmann, Stephan Reichelt, Richard Leach, Samanta Piano

*Corresponding author for this work

Research output: Contribution to journalJournal articleResearchpeer-review

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