Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions

Dirch Hjorth Petersen, Rong Lin, Torben Mikael Hansen, E. Rosseel, W. Vandervorst, C. Markvardsen, Daniel Kjær, Peter Folmer Nielsen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    In this comparative study, the authors demonstrate the relationship/correlation between macroscopic and microscopic four-point sheet resistance measurements on laser annealed ultra-shallow junctions (USJs). Microfabricated cantilever four-point probes with probe pitch ranging from 1.5 to 500 mu m have been used to characterize the sheet resistance uniformity of millisecond laser annealed USJs. They verify, both experimentally and theoretically, that the probe pitch of a four-point probe can strongly affect the measured sheet resistance. Such effect arises from the sensitivity (or "spot size") of an in-line four-point probe. Their study shows the benefit of the spatial resolution of the micro four-point probe technique to characterize stitching effects resulting from the laser annealing process.
    Original languageEnglish
    JournalJournal of Vacuum Science & Technology B
    Volume26
    Issue number1
    Pages (from-to)362-367
    ISSN1071-1023
    DOIs
    Publication statusPublished - 2008

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