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Compact MEMS/NEMS characterization platform using a DVD optical pick-up unit with optical imaging function
Ching-Hsiu Chen, Hsien-Shun Liao, Ing-Shouh Hwang, En-Te Hwu, Ching-Hsiu Chen, Kuang-Yuh Huang, Peter Emil Larsen, Silvan Schmid, Anja Boisen, En-Te Hwu
Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review