Combined nanoimprint and photolithography of integrated polymer optics

Mads Brøkner Christiansen, Mikkel Schøler, Anders Kristensen

    Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

    Original languageEnglish
    Publication date2007
    Publication statusPublished - 2007
    EventIMicromachining Technology for Micro-optics and Nano-optics V, part of the SPIE Symposium on MOEMS-MEMS 2007 Micro and Nanofabrication at SPIE's Photonics West - San Jose, CA USA
    Duration: 1 Jan 2007 → …

    Conference

    ConferenceIMicromachining Technology for Micro-optics and Nano-optics V, part of the SPIE Symposium on MOEMS-MEMS 2007 Micro and Nanofabrication at SPIE's Photonics West
    CitySan Jose, CA USA
    Period01/01/2007 → …

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