Combined electron beam lithography and UV lithography in SU-8

Morten Gersborg-Hansen, Lasse Højlund Thamdrup, A. Mironov, Anders Kristensen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the 32nd International Conference on Micro and Nano Engineering
    Publication date2006
    Publication statusPublished - 2006
    Event32nd International Conference on Micro- and Nano- Engineering 2006 - La Caixa, Barcelona, Spain
    Duration: 17 Sep 200620 Sep 2006
    Conference number: 32
    http://www.mne-conf.org/2006/exhibition.php

    Conference

    Conference32nd International Conference on Micro- and Nano- Engineering 2006
    Number32
    LocationLa Caixa
    CountrySpain
    CityBarcelona
    Period17/09/200620/09/2006
    SponsorLa Caixa
    Internet address

    Cite this

    Gersborg-Hansen, M., Thamdrup, L. H., Mironov, A., & Kristensen, A. (2006). Combined electron beam lithography and UV lithography in SU-8. In Proceedings of the 32nd International Conference on Micro and Nano Engineering