TY - JOUR
T1 - Combined Differential and Static Pressure Sensor based on a Double-Bridged Structure
AU - Pedersen, Casper
AU - Jespersen, S.T.
AU - Krog, J.P.
AU - Christensen, C.
AU - Thomsen, Erik Vilain
PY - 2005
Y1 - 2005
N2 - A combined differential and static silicon microelectromechanical system pressure sensor based on a double piezoresistive Wheatstone bridge structure is presented. The developed sensor has a conventional (inner) bridge on a micromachined diaphragm and a secondary (outer) bridge on the chip substrate. A novel approach is demonstrated with a combined measurement of outputs from the two bridges, which results in a combined deduction of both differential and static media pressure. Also following this new approach, a significant improvement in differential pressure sensor accuracy is achieved. Output from the two bridges depends linearly on both differential and absolute (relative to atmospheric pressure) media pressure. Furthermore, the sensor stress distributions involved are studied by three-dimensional finite-element (FE) stress analysis. Furthermore, the FE analysis evaluates current and other potential piezoresistor positions on the outer Wheatstone bridge.
AB - A combined differential and static silicon microelectromechanical system pressure sensor based on a double piezoresistive Wheatstone bridge structure is presented. The developed sensor has a conventional (inner) bridge on a micromachined diaphragm and a secondary (outer) bridge on the chip substrate. A novel approach is demonstrated with a combined measurement of outputs from the two bridges, which results in a combined deduction of both differential and static media pressure. Also following this new approach, a significant improvement in differential pressure sensor accuracy is achieved. Output from the two bridges depends linearly on both differential and absolute (relative to atmospheric pressure) media pressure. Furthermore, the sensor stress distributions involved are studied by three-dimensional finite-element (FE) stress analysis. Furthermore, the FE analysis evaluates current and other potential piezoresistor positions on the outer Wheatstone bridge.
U2 - 10.1109/JSEN.2005.845199
DO - 10.1109/JSEN.2005.845199
M3 - Journal article
SN - 1530-437X
VL - 5
SP - 446
EP - 454
JO - I E E E Sensors Journal
JF - I E E E Sensors Journal
IS - 3
ER -