Combined Differential and Relative MEMS Pressure Sensor based on a Double-bridged Structure

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the IEEE Sensors
Publication date	2003
Publication status	Published - 2003

OpenUrl availability

@inproceedings{5b2b56df1bbe422ab9250df01bf00525,

title = "Combined Differential and Relative MEMS Pressure Sensor based on a Double-bridged Structure",

author = "Casper Pedersen and Jespersen, \{Simon Tage\} and J.P. Krog and C. Christensen and Thomsen, \{Erik Vilain\}",

year = "2003",

language = "English",

booktitle = "Proceedings of the IEEE Sensors",

}